Optical inspection device and inspecting method using the same
AssigneeSamsung Display Co., Ltd.
InventorsJeong Moon LEE, Dae Hong KIM, Hyung Jin LEE
Life of this patent
Estimating the term…
Abstract
An optical inspection device includes: a barrel; a first light source unit at a first side of the barrel and configured to irradiate light of a first wavelength range through a first light path; a second light source unit at a second side of the barrel, the second side being different from the first side, and configured to irradiate light of a second wavelength range that is different from the first wavelength range through a second light path; and a camera. At least a portion of the first light path is different from the second light path.
Claims20
An optical inspection device comprising:
- a barrel;
- a first light source unit at a first side of the barrel and configured to irradiate light of a first wavelength range through a first light path;
- a second light source unit at a second side of the barrel, the second side being different from the first side, and configured to irradiate light of a second wavelength range that is different from the first wavelength range through a second light path;
- and
- a camera,
- wherein at least a portion of the first light path is different from the second light path.
An optical inspection device comprising:
- a first light source unit configured to irradiate ultraviolet or infrared light through a first light path;
- a second light source unit configured to irradiate visible light through a second light path;
- and
- a camera configured to capture an image of a target object irradiated with light from the first light source unit or the second light source unit,
- wherein at least a portion of the first light path is different from the second light path.
An inspection method using an optical inspection device, the optical inspection device comprising a first light source unit and a second light source unit configured to irradiate light of different wavelength ranges, the method comprising:
- selecting the first light source unit or the second light source unit according to transparency or a color of a target object to be inspected;
- and
- capturing an image of the target object to be inspected by irradiating light from the selected one of the first light source unit or the second light source unit to the target object.
Dependencies are inferred from the claim text.