Thermal laser evaporation system and method of providing a thermal laser beam at a source

A thermal laser evaporation system, the thermal laser evaporation system comprising:

• a laser light source for providing a thermal laser beam for evaporating one or more materials from a source;
• a thermal laser beam shaping system comprising a collimation lens and a focusing lens for directing the thermal laser beam onto the source;
• a vacuum chamber;
• a vacuum window for conducting the thermal laser beam into the vacuum chamber;
• and
• an aperture arranged within the vacuum chamber between the vacuum window and the source,
• wherein the thermal laser beam shaping system comprises a shaping device arranged in between the collimation lens and the focusing lens for adapting at least one of a position, a shape, and a size of the thermal laser beam at the source.

A method of providing a thermal laser beam at a source in order to evaporate one or more materials from the source;

• the method comprising the steps of:
• providing a thermal laser beam;
• directing the thermal laser beam via a thermal laser beam shaping system comprising a collimation lens, a shaping device and a focusing lens into a vacuum chamber comprising a vacuum window for conducting the thermal laser beam into the vacuum chamber and through an aperture arranged within the vacuum chamber at the source,
• wherein the step of directing the thermal laser beam via the thermal laser beam shaping system comprises a configuration of at least one of a position, a shape, and a size of the thermal laser beam at the source by the shaping device.