Semiconductor testing device, semiconductor testing method, and manufacturing method for semiconductor device

A semiconductor testing method to test a characteristic of a test object including a first semiconductor element, wherein

• the first semiconductor element includes a positive electrode, a negative electrode, and a control electrode, and is turned on or off in response to a first control signal input to the control electrode,
• the test object further includes
• a first main electrode electrically connected to the positive electrode of the first semiconductor element,
• a second main electrode electrically connected to the negative electrode of the first semiconductor element, and
• a first capacitor electrically connected between the first main electrode and the second main electrode, and
• the semiconductor testing method comprises:
• charging the first capacitor with a DC voltage supplied from a DC power supply electrically connected between the first main electrode and the second main electrode;
• and
• inputting, to the control electrode of the first semiconductor element, the first control signal for turning on the first semiconductor element, after charging the first capacitor.

A manufacturing method for a semiconductor device including a semiconductor element, the manufacturing method comprising:

• assembling the semiconductor device by mounting the semiconductor element on a housing;
• testing a characteristic of the semiconductor device;
• and
• commercializing the semiconductor device having been acceptable in the testing,
• wherein the semiconductor element includes a positive electrode, a negative electrode, and a control electrode, and is turned on or off in response to a control signal input to the control electrode,
• the semiconductor device further includes
• a first main electrode electrically connected to the positive electrode of the semiconductor element,
• a second main electrode electrically connected to the negative electrode of the semiconductor element, and
• a first capacitor electrically connected between the first main electrode and the second main electrode, and
• the testing includes
• charging the first capacitor with a DC voltage supplied from a DC power supply electrically connected between the first main electrode and the second main electrode, and
• inputting, to the control electrode of the semiconductor element, the control signal for turning on the semiconductor element, after charging the first capacitor.