Method for depositing nanostructures on substrate and nanostructure arrays
AssigneePeking University
InventorsWei SUN, Yahong CHEN
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Abstract
A method for depositing nanostructures on a substrate comprises: forming a patterned alignment layer on a surface of the substrate, wherein the patterned alignment layer has one or more cavities each having a main region for accommodating at least one template nanostructure therein and a plurality of extension regions extending from the main region and in fluid communication with the main region, and wherein the plurality of extension regions are sized and shaped to not accommodate the at least one template nanostructure; and diffusing template nanostructures into the one or more cavities of the patterned alignment layer.
Claims22
A method for depositing nanostructures on a substrate, comprising:
- forming a patterned alignment layer on a surface of the substrate, wherein the patterned alignment layer has one or more cavities each having a main region for accommodating at least one template nanostructure therein and a plurality of extension regions extending from the main region and in fluid communication with the main region, and wherein the plurality of extension regions are sized and shaped to not accommodate the at least one template nanostructure;
- and
- diffusing template nanostructures into the one or more cavities of the patterned alignment layer.
Dependencies are inferred from the claim text.