Etch uniformity improvement for single turn internal coil pvd chamber
AssigneeApplied Materials, Inc.
InventorsAnthony Chih-Tung CHAN, Adolph Miller ALLEN, Mehul CHAUHAN
Life of this patent
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Abstract
Methods and apparatus for generating a magnetic field external to a physical vapor deposition (PVD) chamber to improve etch or deposition uniformity on a substrate disposed inside of the PVD chamber are provided herein. In some embodiments, a process chamber, includes a chamber body defining an interior volume therein; a pedestal disposed in the interior volume for supporting a substrate; a coil disposed in the interior volume above the pedestal; and an external magnet assembly, comprising: a housing coupled to the chamber body; and a plurality of magnets disposed external to the chamber body coupled to the housing and arranged asymmetrically about the chamber body.
Claims20
A process chamber, comprising:
- a chamber body defining an interior volume therein;
- a pedestal disposed in the interior volume for supporting a substrate;
- a coil disposed in the interior volume above the pedestal;
- and
- an external magnet assembly, comprising:
- a housing coupled to the chamber body;
- and
- a plurality of magnets disposed external to the chamber body coupled to the housing and arranged asymmetrically about the chamber body.
An external magnet assembly for use with a process chamber, comprising:
- a housing having a plate and an inner lip extending upward from the plate to define a central opening of the housing;
- a plurality of arcuate base plates coupled to the housing;
- and
- a plurality of magnets coupled to each of the plurality of arcuate base plates.
A process chamber, comprising:
- a chamber body coupled to a lid to define an interior volume therein;
- a pedestal disposed in the interior volume for supporting a substrate;
- a coil disposed in the interior volume above the pedestal;
- and
- an external magnet assembly, comprising:
- a housing coupled to the chamber body,
- two arcuate base plates coupled to the housing;
- and
- a plurality of magnets disposed external to the chamber body coupled to the housing via the two arcuate base plates and arranged asymmetrically about the chamber body, wherein the plurality of magnets are arranged in a plurality of magnet sets.
Dependencies are inferred from the claim text.