Fluid control device
AssigneeMurata Manufacturing Co., Ltd.
InventorNobuhira TANAKA
Life of this patent
Estimating the term…
Abstract
A fluid control device includes: a first flat plate; a frame disposed outside an outer peripheral end of the first flat plate via openings; a connection member connecting the first flat plate and the frame; a plate member having through holes in a portion facing the first flat plate; and a valve member configured to rectify a fluid flow. An outer end of the valve member projects toward an outside of the outer peripheral end of the first flat plate. A portion of the valve member closer to an inner end thereof located closer to a center of the first flat plate is fixed to the first flat plate. The outer end of the valve member is not fixed. The valve member has a first portion closer to the outer end, and a second portion closer to an inner end of the first portion.
Claims20
A fluid control device comprising:
- a first flat plate;
- a frame disposed outside an outer peripheral end of the first flat plate;
- a connection member connecting the first flat plate and the frame;
- a first opening surrounded by the first flat plate, the frame, and the connection member;
- a second flat plate having a second opening in a portion facing the first flat plate;
- a side wall member connecting the frame and the second flat plate, the side wall member together with the first flat plate and the second flat plate forming a pump chamber;
- a driver set on one of the first flat plate and the second flat plate;
- and
- a valve member set on a first surface closer to the pump chamber, of the first flat plate, the valve member being configured to rectify a fluid flow, wherein
- the valve member has
- a fixed portion fixed to the first flat plate, and
- a projection having an outer end projecting toward an outside of the outer peripheral end when the valve member is viewed in plan view,
- the projection has
- a first portion having a first thickness, and
- a second portion located between the first portion and the fixed portion, the second portion having a second thickness,
- the second thickness is thicker than the first thickness, and
- at least a part of the second portion overlaps the first opening when the first surface of the first flat plate is viewed in front view.
A fluid control device comprising:
- a first flat plate;
- a frame disposed outside an outer peripheral end of the first flat plate;
- a connection member connecting the first flat plate and the frame;
- a first opening surrounded by the first flat plate, the frame, and the connection member;
- a second flat plate having a second opening in a portion facing the first flat plate;
- a side wall member connecting the frame and the second flat plate, the side wall member together with the first flat plate and the second flat plate forming a pump chamber;
- a driver set on one of the first flat plate and the second flat plate;
- and
- a valve member set on a main surface, closer to the pump chamber, of the second flat plate, the valve member being configured to rectify a fluid flow, wherein a part of the valve member is fixed to the second flat plate,
- an inner end of the valve member is not fixed to the second flat plate and projects so as to overlap the second opening when viewed in a facing direction of the main surface of the second flat plate facing a main surface of the first flat plate,
- the valve member has
- a first portion having a first thickness, the first portion forming a portion closer to the inner end, and
- a second portion having a second thickness, the second portion forming a portion closer to an outer end of the first portion,
- the second thickness is thicker than the first thickness, and
- the second portion overlaps a wall of the second opening when the second flat plate is viewed in plan view.
Dependencies are inferred from the claim text.