Silicon carbide wafer and method of manufacturing same
AssigneeSenic Inc.
InventorsMyung Ok KYUN, Kap Ryeol Ku, Jung Gyu Kim, Jung Woo Choi, Jung Doo Seo, Jong Hwi Park
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AssigneeSenic Inc.
InventorsMyung Ok KYUN, Kap Ryeol Ku, Jung Gyu Kim, Jung Woo Choi, Jung Doo Seo, Jong Hwi Park
Estimating the term…
Disclosed are a silicon carbide wafer and a method of manufacturing the same. The silicon carbide wafer includes an upper surface and a lower surface, the upper surface includes a first target region, the first target region being within 85% of a radius of the upper surface based on a center of the upper surface, a first peak omega angle measured at intervals of 15 mm in a first direction in the first target region is within −1° to +1° based on a peak omega angle measured at the center of the upper surface, and the first direction is a [1-100] direction and a direction passing through the center of the upper surface.
A silicon carbide wafer comprising an upper surface and a lower surface,
A method of manufacturing a silicon carbide wafer, comprising:
Dependencies are inferred from the claim text.