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US 2023/0138692 A1Published application
Trap device and substrate processing apparatus comprising the same
AssigneeSemes Co., Ltd.
InventorJin Woo YANG
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a substrate processing apparatus capable of stably controlling a meniscus position. The substrate processing apparatus comprises a head unit configured to discharge a medical fluid; a reservoir configured to store the medical fluid and supply the medical fluid to the head unit; a pressure control unit configured to control pressure in the reservoir; and a trap unit disposed between the reservoir and the pressure control unit and configured to trap a mist generated by the reservoir.
Claims20
A substrate processing apparatus, comprising:
- a head unit configured to discharge a medical fluid;
- a reservoir configured to store the medical fluid and supply the medical fluid to the head unit;
- a pressure control unit configured to control pressure in the reservoir;
- and
- a trap unit disposed between the reservoir and the pressure control unit and configured to trap a mist generated by the reservoir.
2 more elements
A substrate processing apparatus, comprising:
- a stage configured to process a substrate:
- a gantry disposed to cross the stage;
- and
- an inkjet head module installed in the gantry and configured to discharge ink to the substrate,
- wherein the inkjet head module comprises:
- a head unit configured to discharge the ink;
- a reservoir configured to store the ink and supply the ink to the head unit;
- a pressure control unit configured to control pressure in the reservoir;
- and
- a trap unit disposed between the reservoir and the pressure control unit and configured to trap a mist generated by the reservoir,
- wherein the trap unit comprises:
- a body;
- a first line installed in the body, connected to the reservoir and extending in a first direction;
- a second line installed in the body, connected to the pressure control unit and extending in a second direction;
- a third line installed to penetrate the first line and the second line from a upper surface of the body;
- and
- a trap layer installed on an inner wall of the first line or an inner wall of the second line and configured to trap the mist.
14 more elements
A trap device, comprising:
- a body;
- a first line installed in the body, connected to an inlet and extending in one direction;
- a second line installed in the body, connected to an outlet and extending in the one direction;
- a third line installed to penetrate the first line and the second line from an upper surface of the body;
- and
- a trap layer installed on an inner wall of the first line or an inner wall of the second line and configured to trap a mist.
3 more elements
Dependencies are inferred from the claim text.