Processing system and processing method for blocked microreactor

A processing system for a blocked microreactor, comprising an air intake device, a flushing device, a microreactor to be processed and a plasma processing device, wherein

• one end of the microreactor (11) to be processed is connected with the air intake device and the flushing device through a pipeline;
• the other end of the microreactor (11) to be processed is connected with a waste liquid bottle (16) through the pipeline;
• the microreactor (11) to be processed is arranged between electrodes (9) of the plasma processing device;
• the microreactor (11) to be processed is connected with the air intake device through the pipeline;
• a four-way valve (7) is arranged between the microreactor to be processed and the air intake device;
• and three valves of the four-way valve (7) are respectively connected with an air cylinder (1), an oxygen cylinder (2) and an argon cylinder (3);
• the air intake device is also provided with a mass flow control meter (4) for regulating a gas flow;
• and the opening of the mass flow control meter (4) is 20-50 sccm;
• the plasma processing device comprises electrodes (9), an AC power supply (12) and an oscilloscope (13), and a quartz sheet (10) is arranged between the electrodes (9) and the microreactor (11) to be processed;
• the electrodes (9) are stainless steel, copper, zinc or iron electrodes, and have the shapes of circular, square, triangular, rectangular or other irregular patterns, and processing area is 1-100 cm2;
• and the quartz sheet (10) has an edge larger than the edges of the electrodes (9) by 1-2 cm, and a thickness of 1-3 mm;
• the processing system also comprises a monitoring device, and the monitoring device comprises a camera (15) and a display (14).