Micro-electro-mechanical systems micromirrors and micromirror arrays
AssigneePreciseley Microtechnology Corp.
InventorTiansheng ZHOU
Life of this patent
Estimating the term…
Abstract
A micromirror which comprises a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis; a first comb drive which has a first position fixed relative to the mirror and second portion fixed relative to the mount. The first comb drive being for actuating the mirror about the first axis. A weight connected to the mirror, and the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure. The first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.
Claims25
1-48. (canceled)
A micromirror comprising:
- a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis;
- a first comb drive having a first position fixed relative to the mirror and second portion fixed relative to the mount, the first comb drive being for actuating the mirror about the first axis;
- and
- a weight connected to the mirror, the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure, wherein the first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.
A micromirror comprising:
- an array of micromirrors, each micromirror comprising:
- a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis;
- a first comb drive having a first position fixed relative to the mirror and second portion fixed relative to the mount, the first comb drive being for actuating the mirror about the first axis;
- and
- a weight connected to the mirror, the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure, wherein the first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.
A micromirror array comprising:
- a plurality of micromirrors attached to a mount, each micromirror comprising:
- a first end and a second end, the second end being connected to the mount;
- a mirror at the first end;
- a hinge attached to the mount, the hinge being for permitting rotation of the mirror about a first axis;
- and
- a first comb drive for actuating the mirror about the first axis;
- and
- first and second rows of the micromirrors, the micromirrors being positioned such that the first ends of the mirrors in the first and second rows are opposite one another.
Dependencies are inferred from the claim text.