Back to results
US 2023/0120539 A1Published application
Metallized high-index blaze grating incoupler
AssigneeApplied Materials, Inc.
InventorsJianji YANG, Samarth BHARGAVA, David SELL
Life of this patent
Estimating the term…
Abstract
A method of forming a plurality of gratings for an optical device structure are provided. The method utilizes a high refractive index material and a metallic coating.
Claims20
A waveguide, comprising:
- a plurality of blazed structures, comprising:
- a grating material layer comprising a grating material having a refractive index greater than or equal to 2.0;
- and
- a metallic coating formed on a patterned surface of the grating material layer.
1 more element
A method of forming a waveguide, comprising:
- depositing a layer of a grating material having a refractive index greater than or equal to 2.0;
- patterning the layer of the grating material to form a patterned surface comprising a first blazed surface having a first blaze angle and a second blazed surface having a second blaze angle;
- and
- depositing a metallic coating consisting of a metal on the patterned surface.
1 more element
A method of forming a waveguide, comprising:
- patterning a substrate to form a patterned surface comprising a first blazed surface having a first blaze angle and a second blazed surface having a second blaze angle;
- and
- depositing a metallic coating on the patterned surface.
Dependencies are inferred from the claim text.