Wafer scale production of superconducting magnesium diboride thin films with high transition temperature
AssigneeCalifornia Institute of Technology
InventorsChangsub Kim, Daniel P. Cunnane
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AssigneeCalifornia Institute of Technology
InventorsChangsub Kim, Daniel P. Cunnane
Estimating the term…
A method of making a film comprising depositing magnesium and boron on a substrate; depositing a capping layer to form a capped film; and cooling the capped film so as to form a magnesium diboride film. The depositing may comprise tuning a ratio of the Mg to the B so as to tailor a resistivity of the magnesium diboride film anywhere in the range 10 μΩ*cm≤ρ≤500 mΩ*cm, and so as to form the magnesium diboride film comprising a superconductive film having a critical temperature greater than 10K or in a range 10K-40K. The magnesium diboride film can have an area greater than or equal to a circular area having a diameter of at least 4 inches; a thickness and sheet resistance varying by less than 10% over an entirety of the area; and a surface roughness less than 2 nm over the entirety of the area.
A wafer, comprising:
A wafer, comprising:
A method of making a film comprising magnesium diboride, comprising:
Dependencies are inferred from the claim text.