Resonance device, collective substrate, and resonance device manufacturing method
AssigneeMurata Manufacturing Co., Ltd.
InventorsMasakazu FUKUMITSU, Takashi UEDA
Life of this patent
Estimating the term…
Abstract
A resonance device that includes a MEMS substrate including a resonator having a vibrating portion, a holding portion configured to hold the vibrating portion, and an isolation groove that surrounds the vibrating portion in a plan view of the resonance device; and an upper lid facing the MEMS substrate with the resonator interposed therebetween and that includes a connection wiring electrically connected to the vibrating portion.
Claims16
A resonance device comprising:
- a first substrate including a resonator having a vibrating portion, a holding portion configured to hold the vibrating portion, and an isolation groove that surrounds the vibrating portion in a plan view of the resonance device;
- and
- a second substrate facing the first substrate with the resonator interposed therebetween and that includes a first connection portion electrically connected to the vibrating portion.
A collective substrate for manufacture of a resonance device, the collective substrate comprising:
- a first substrate having a plurality of resonators each having a vibrating portion, a holding portion configured to hold the vibrating portion, and an isolation groove that surrounds the vibrating portion in a plan view of the collective substrate;
- and
- a second substrate facing the first substrate with the plurality of resonators interposed therebetween and that includes a plurality of first connection portions respectively electrically connected to the vibrating portions of the plurality of resonators.
A method of manufacturing resonance devices, the method comprising:
- preparing a first substrate including a plurality of resonators each having a vibrating portion, a holding portion configured to hold the vibrating portion, and an isolation groove that surrounds the vibrating portion in a plan view of the first substrate;
- placing a second substrate so as to face the first substrate with the plurality of resonators interposed therebetween and that includes a plurality of first connection portions to be respectively and electrically connected to the vibrating portions of the plurality of resonators;
- jointing the first substrate to the second substrate;
- and
- splitting the first substrate and the second substrate along split lines so as to form a plurality of resonance devices.
Dependencies are inferred from the claim text.