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AssigneeSolvay SA
InventorsJürgen Bosse, Matthias Dabrunz, Lennart Möhlmann, Josephine Rost
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A process for the purification of an aqueous hydrogen peroxide solution includes the following steps: (a) the treatment of an aqueous hydrogen peroxide solution with at least one first reverse osmosis system, (b) the treatment of the obtained hydrogen peroxide solution with at least one first stabilizer, (c) the treatment of the obtained hydrogen peroxide solution with at least one purification mean selected from adsorption resins, ion exchange resins, and combinations thereof. An aqueous hydrogen peroxide solution obtainable thereby is described. The use of the aqueous hydrogen peroxide solution in the manufacture of microelectronic components and semiconductors is also described.
A process for purification of an aqueous hydrogen peroxide solution comprising at least the following steps:
An aqueous hydrogen peroxide solution, wherein the aqueous hydrogen peroxide solution comprises less than 1 mg of Total Organic Carbon (TOC) per kg of aqueous hydrogen peroxide solution and a total nitrogen content (TN) of below 0.05 mg/kg.
Dependencies are inferred from the claim text.