US 2023/0107154 A1 · MAINTENANCE METHOD AND HEAT TREATMENT APPARATUS

Abstract

Provided is a maintenance method of a heat treatment apparatus including a chamber having a box shape and provided with a heater and a receiving member that supports a cassette having a box shape including a space in which a workpiece is supported. The maintenance method includes: attaching a loading/unloading jig including a roller on an upper portion and capable of moving the roller upward and downward, to the receiving member; transmitting the cassette supported by the receiving member onto the roller by raising the loading/unloading jig; unloading the cassette to an outside of the chamber by moving the cassette on the roller; loading the cassette into the chamber by moving the cassette on the roller; transmitting the cassette to the receiving member by lowering the loading/unloading jig; and detaching the loading/unloading jig from the receiving member.

Claims13

Dependent claims

A maintenance method of a heat treatment apparatus including a chamber having a box shape and provided with a heater, the maintenance method comprising:

attaching a loading/unloading jig to a receiver of the heat treatment apparatus that supports a cassette having a box shape and including a space in which a workpiece is supported, the loading/unloading jig including a roller on an upper portion and being configured to move the roller upward and downward;
transmitting the cassette supported by the receiver onto the roller by raising the loading/unloading jig;
unloading the cassette to an outside of the chamber by moving the cassette on the roller;
loading the cassette into the chamber by moving the cassette on the roller;
transmitting the cassette to the receiver by lowering the loading/unloading jig;
and
detaching the loading/unloading jig from the receiver.

4 more elements

A heat treatment apparatus comprising:

a chamber;
a cassette rack provided inside the chamber and including at least a pair of receivers;
a first heater provided above the pair of receivers and including at least one first sub-heater;
a second heater provided below the pair of receivers to face the first heater and including at least one second sub-heater;
and
a cassette having a box shape and including a space in which a workpiece is supported, and detachably supported by the pair of receivers between the first heater and the second heater,
wherein a cassette support supported by the receiver is provided on each of a pair of side surfaces of the cassette, which face each other.

4 more elements

Dependencies are inferred from the claim text.

Maintenance method and heat treatment apparatus

Life of this patent

Maintenance method and heat treatment apparatus

Life of this patent

Abstract

Claims13