Piezoelectric mems microphone with spring region
AssigneeSkyworks Solutions, Inc.
InventorsGuofeng Chen, You Qian, Rakesh Kumar, Michael Jon Wurtz, Humberto Campanella-Pineda
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Abstract
A piezoelectric microelectromechanical systems microphone is provided comprising a substrate including at least one wall defining a cavity, the at least one wall defining an anchor region around a perimeter, a piezoelectric film layer forming a membrane, the piezoelectric film layer being supported at the anchor region by a spring region, and an electrode disposed over the piezoelectric film layer. A method of manufacturing such a MEMS microphone is also provided.
Claims24
A piezoelectric microelectromechanical systems microphone, comprising:
- a substrate including at least one wall defining a cavity, the at least one wall defining an anchor region around a perimeter;
- a piezoelectric film layer forming a membrane, the piezoelectric film layer being supported at the anchor region by a spring region;
- and
- an electrode disposed over the piezoelectric film layer.
A method for manufacturing a piezoelectric microelectromechanical systems microphone, comprising:
- depositing a piezoelectric film layer on a substrate to define a membrane;
- forming a spring region;
- and
- etching the substrate to define a cavity.
A wireless mobile device comprising:
- one or more antennas;
- a front end system that communicates with the one or more antennas;
- and
- one or more piezoelectric microelectromechanical systems microphones, each microphone including a substrate having at least one wall defining a cavity, the at least one wall defining an anchor region around a perimeter, a piezoelectric film layer forming a membrane, the piezoelectric film layer being supported at the anchor region by a spring region, and an electrode disposed over the piezoelectric film layer.
Dependencies are inferred from the claim text.