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US 2023/0103757 A1Published application
Resonator and method of manufacturing the resonator, and strain sensor and sensor array including the resonator
AssigneeSamsung Electronics Co., Ltd.
InventorsCheheung Kim, Sungchan Kang, Choongho Rhee, Yongseop Yoon, Hyeokki Hong
Life of this patent
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Abstract
Provided are a resonator, a method of manufacturing the resonator, and a strain sensor and a sensor array including the resonator. The resonator is provided to extend in a lengthwise direction from a support. The resonator includes a single crystal material and is provided to extend in a crystal orientation that satisfies at least one from among a Young's modulus and a Poisson's ratio, from among crystal orientations of the single crystal material.
Claims8
A method of manufacturing a resonator comprising:
- patterning a substrate including a single crystal material to form a portion of the substrate to extend in a crystal orientation determined based on at least one from among a Young's modulus and a Poisson's ratio, the crystal orientation being from among crystal orientations of the single crystal material.
A method of manufacturing a resonator comprising:
- providing a reference line pattern parallel to a flat zone of a single crystal material wafer on a photomask;
- patterning a resonating portion on the single crystal material wafer based on the photomask,
- wherein the resonating portion is patterned at an inclined angle with respect to the reference line pattern based on at least one from among a Young's modulus and a Poisson's ratio.
Dependencies are inferred from the claim text.