Photoresist underlayer composition

A photoresist underlayer composition, comprising:

• a first material comprising two or more hydroxy groups;
• a second material comprising two or more glycidyl groups;
• an additive, wherein the additive comprises a compound of Formula (5), a compound of Formula (6), or a combination thereof;
• and
• a solvent,
• wherein, in Formulae (5) and (6),
• AA represents a single bond or a double bond;
• X is a single bond, —C(O)—, unsubstituted C1 alkylene, or hydroxy-substituted C1 alkylene;
• Ar5, Ar6, and Ar7 are each independently C6-60 aryl or C1-60 heteroaryl;
• wherein Ar5, Ar6, and Ar7 are each independently substituted with at least two groups of formula —OR2;
• optionally, wherein Ar5, Ar6, and Ar7 are each independently further substituted;
• R1 and R2 are each independently hydrogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, —C(O)OR5a, or glycidyl;
• each RA is independently substituted or unsubstituted C1-10 alkyl, substituted or unsubstituted C1-10 heteroalkyl, substituted or unsubstituted C3-10 cycloalkyl, substituted or unsubstituted C2-10 heterocycloalkyl, substituted or unsubstituted C6-12 aryl, or substituted or unsubstituted C1-10 heteroaryl;
• each R5a is independently hydrogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C1-30 heteroalkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C2-30 heterocycloalkyl, substituted or unsubstituted C2-30 alkenyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C1-30 heteroaryl, substituted or unsubstituted C2-30 heteroarylalkyl, or substituted or unsubstituted C2-30 alkylheteroaryl;
• R3 is hydrogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C1-30 heterocycloalkyl, a carboxylic acid group or a derivative thereof, or —C(O)OR5b;
• R5b is substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C1-30 heteroalkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C2-30 heterocycloalkyl, substituted or unsubstituted C2-30 alkenyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C1-30 heteroaryl, substituted or unsubstituted C2-30 heteroarylalkyl, or substituted or unsubstituted C2-30 alkylheteroaryl;
• a is an integer from 2 to 4;
• m is an integer from 1 to 6;
• n is 0 or 1;
• p is an integer from 0 to 2;
• and
• Y2 is hydrogen, substituted or unsubstituted C6-60 aryl, or substituted or unsubstituted C1-60 heteroaryl.