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US 2023/0094492 A1Published application
Adsorbent-type storage and delivery vessels with high purity delivery of gas, and related methods
AssigneeEntegris, Inc.
InventorsOleg Byl, Joe R. Despres, Ed A. Sturm
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Abstract
Described are storage and dispensing systems, and related methods, for storing and selectively dispensing high purity reagent gas from a storage vessel in which the reagent gas is held in sorptive relationship to pyrolyzed carbon adsorption particles.
Claims28
A storage system for storing adsorbed reagent gas, the system comprising:
- a high pressure storage vessel comprising an interior that contains nano-porous pyrolyzed carbon adsorbent particles, and
- reagent gas adsorbed on the adsorbent particles,
- wherein a pressure at the interior is below 1500 torr.
A storage system for storing adsorbed reagent gas, the system comprising:
- a high pressure storage vessel comprising:
- polished sidewall surfaces having a roughness (Ra) of less than 1 nm,
- non-welded sidewalls and bottom,
- a volume of at least 10 liters, and
- nano-porous pyrolyzed carbon adsorbent particles.
2 more elements
A method of preparing carbon adsorbent particles, the method comprising:
- forming synthetic polymer carbon precursor resin particles,
- pyrolyzing the precursor resin particles in an inert atmosphere to produce nano-porous pyrolyzed carbon adsorbent particles,
- placing the pyrolyzed carbon adsorbent particles into a high pressure storage vessel while containing the particles and the vessel in an inert gas atmosphere,
- exposing the pyrolyzed carbon adsorbent particles in the vessel to elevated temperature and reduced pressure to remove atmospheric contaminants adsorbed on the particles and the vessel, and
- filling the vessel with the reagent gas.
2 more elements
Dependencies are inferred from the claim text.