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US 2023/0094448 A1Published application
Oven controlled mems oscillator with multiple temperature control loops
AssigneeTexas Instruments Incorporated
InventorsBichoy BAHR, Baher HAROUN, Swaminathan SANKARAN, Argyrios DELLIS, Sachin KALIA
Life of this patent
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Abstract
In an example, a system includes a BAW resonator. The system also includes a first heater configured to heat the BAW resonator, where the first heater is controlled by a first control loop. The system includes a circuit coupled to the BAW resonator. The system also includes a second heater configured to heat the circuit, where the second heater is controlled by a second control loop.
Claims21
A system, comprising:
- a bulk acoustic wave (BAW) resonator;
- a BAW die;
- a first heater configured to heat the BAW resonator, wherein the first heater is controlled by a first control loop;
- a circuit coupled to the BAW resonator;
- and
- a second heater configured to heat the circuit, wherein the second heater is controlled by a second control loop,
- wherein the BAW resonator and the first heater are directly coupled to each other and anchored to a portion of the BAW die.
4 more elements
A system, comprising:
- a bulk acoustic wave (BAW) resonator on a BAW die;
- a first heater configured to heat the BAW resonator, wherein the first heater is a resistive heater configured to be controlled by a first control loop;
- a circuit die;
- a circuit on the circuit die and coupled to the BAW resonator;
- a second heater configured to heat the circuit, wherein the second heater is configured to be controlled by a second control loop;
- and
- a third heater disposed between the circuit die and the BAW resonator and configured to heat the BAW die, wherein the third heater is configured to be controlled by a third control loop.
4 more elements
A system, comprising:
- a bulk acoustic wave (BAW) resonator on a BAW die;
- a first heater configured to heat the BAW resonator, wherein the first heater is a resistive heater configured to be controlled by a first control loop;
- a circuit coupled to the BAW resonator;
- a second heater configured to heat the circuit, wherein the second heater is configured to be controlled by a second control loop;
- and
- a third heater configured to heat the BAW die, wherein the third heater is configured to be controlled by a third control loop,
- wherein the BAW resonator and the first heater are located on a cantilevered anchor attached to the BAW die.
4 more elements
A system, comprising:
- a bulk acoustic wave (BAW) resonator on a BAW die;
- a first heater configured to heat the BAW resonator, wherein the first heater is configured to be controlled by a first control loop, and the BAW resonator and the first heater are located on a cantilevered anchor attached to the BAW die;
- a circuit coupled to the BAW resonator;
- and
- a second heater configured to heat the circuit and the BAW die, wherein the second heater is configured to be controlled by a second control loop.
2 more elements
Dependencies are inferred from the claim text.