Liquid feeding apparatus and liquid feeding method
AssigneeHitachi High-Tech Corporation
InventorsDaisuke Akieda, Nobuhiro Tsukada, Yusuke Yota, Yuichiro Hashimoto, Jun Maeda
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AssigneeHitachi High-Tech Corporation
InventorsDaisuke Akieda, Nobuhiro Tsukada, Yusuke Yota, Yuichiro Hashimoto, Jun Maeda
Estimating the term…
The present invention relates to a liquid feeding apparatus capable of feeding a liquid with high accuracy. The liquid feeding apparatus includes a liquid feeder having a downstream side, a plunger, and a cylinder that is configured for aspirating and discharging a solvent when a plunger slides. The liquid feeding apparatus further includes a pressure sensor for the solvent to be discharged, a selector valve configured to switch between a plurality of solvents to be aspirated and discharged, and a controller configured to control the liquid feeder and the selector valve. The controller controls the selector valve in synchronization with an aspiration operation of the plunger so that a mixing ratio of the solvents changes, controls the plunger to cause the plunger to operate at first and second accelerations that are different from each other, and suppresses a fluctuation of the solvent to be aspirated by the plunger.
A liquid feeding apparatus comprising:
(canceled)
A liquid feeding method by a liquid feeding apparatus including a liquid feeder having a cylinder for performing, when the plunger slides, an aspiration operation to aspirate a solvent and a discharging operation to discharge the solvent, a pressure sensor installed on the downstream side of the liquid feeder and configured to detect a pressure of the solvent to be discharged, at least one selector valve configured to switch between a plurality of solvents to be aspirated and discharged, and a controller configured to control the liquid feeder and the the selector valve, the method comprising:
(canceled)
Dependencies are inferred from the claim text.