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US 2023/0083235 A1Published application
Ingot puller apparatus having heat shields with feet having an apex
AssigneeGlobalWafers Co., Ltd.
InventorsJiaying Ke, Sumeet S. Bhagavat, Jaewoo Ryu, Benjamin Meyer, William Luter, Carissima Marie Hudson
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Abstract
Ingot puller apparatus for preparing a single crystal silicon ingot by the Czochralski method are disclosed. The ingot puller apparatus includes a heat shield. The heat shield has a leg segment that includes a void (i.e., an open space without insulation) disposed in the leg segment. The heat shield may also include insulation partially within the heat shield.
Claims5
An ingot puller apparatus for growing a monocrystalline silicon ingot from a melt of silicon, the apparatus comprising:
- a housing defining a growth chamber;
- a crucible disposed within the growth chamber for containing the melt of silicon;
- a pulling mechanism configured to pull the ingot from the melt along a pull axis;
- a heat shield disposed within the growth chamber, the heat shield defining a central passage for receiving the ingot as the ingot is pulled by the pulling mechanism, the heat shield having a leg segment that extends along the pull axis, the leg segment comprising a foot at a distal end of the leg segment that extends radially inward, the foot comprising:
- a radially inward lower sidewall;
- and
- a radially inward upper sidewall, the radially inward lower sidewall and radially inward upper sidewall angling toward each other and forming an apex, the apex being the most radially inward portion of the heat shield.
4 more elements
Dependencies are inferred from the claim text.