Multiple stage vacuum pump
AssigneeEdwards Limited
InventorsAlan Ernest Kinnaird Holbrook, David Bedwell
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Abstract
A multi-stage vacuum pump comprising a stator defining multiple pumping chambers is discussed. The stator comprises a plurality of transfer channels for providing a fluid passage from an outlet port of one of the plurality of pumping chambers to an inlet port of a subsequent pumping chamber. Some of the transfer channels comprise two side channel sections on opposing sides of the stator. One of the transfer channels comprises a single side channel section on one side of the stator. The vacuum pump further comprises a gas ballast inlet channel arranged on an other side of the stator to the one side of the stator.
Claims11
A multi-stage vacuum pump comprising:
- a stator defining multiple pumping chambers;
- said stator comprising a plurality of transfer channels each providing a fluid passage from an outlet port of one of said pumping chambers to an inlet port of a subsequent pumping chamber;
- at least one of said transfer channels comprises two side channel sections on opposing side of said stator;
- and
- at least one of said transfer channels comprises a single side channel section on one side of said stator, said vacuum pump further comprising
- a gas ballast inlet channel arranged on an other side of said stator to said one side of said stator.
Dependencies are inferred from the claim text.