Resonant microelectromechanical sensor with improved operation
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsMarc SANSA PERNA, Théo MIANI, Thierry VERDOT
Life of this patent
Estimating the term…
Loading patent…
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsMarc SANSA PERNA, Théo MIANI, Thierry VERDOT
Estimating the term…
A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, means for measuring a force including at least one resonator of resonant frequency ωrn, said force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator, said decoupling structure including a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ωd is such that ωa <ωd< ωrn, said decoupling structure forming a mechanical low-pass filter between the proof body and the resonator. FIG. 1
A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, means for measuring a force including at least one resonator of resonant frequency ωrn, said force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator, said decoupling structure including a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ωd is such that ωa <ωd< ωrn, said mechanical decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.
Dependencies are inferred from the claim text.