Arrangement of optical elements and method for forming structural patterns

An arrangement of optical elements for the formation of structural patterns by means of direct laser interference, the arrangement comprising:

• a triangular or quadrangular prism with two triangular part prisms is formed, which prisms are connected to each other on a planar plane via a layer, the two triangular part prisms comprising properties that split at least one laser beam into part beams and the two triangular part prisms have two equal peak angles α that are each arranged between the planar plane at which the two triangular part prisms are connected to each other;
• and
• an outward-facing surface provided for each of the two triangular part prisms,
• wherein the at least one laser beam is directed onto one of the outward-facing surfaces of one of the two triangular part prisms so that the at least one laser beam is incident on the layer within the prism and there by reflection of a part of the radiation at the layer and transmission of a further part of the radiation by the layer, a split of the at least one laser beam into two part beams being carried out,
• wherein the part beams obtained are incident on one of the outward-facing surfaces of one of the two part prisms are reflected on these surfaces and the part beams emerge from the surfaces of the two part prisms arranged opposite the acute angle α, and from there, are incident on at least one optical element designed such that the part beams are aligned such that they interfere with each other in a region of a component in which a structural pattern is intended to be formed and/or the angle of incidence of the at least one laser beam to the outward-facing surface of one of the two part prisms and angles α, β and γ of the two part prisms, taking into account a wavelength of the at least one laser beam and the optical refractive index of the two part prisms, are selected such that the part beams are aligned such that they interfere with each other in a region of a component in which a structural pattern is intended to be formed.