# US 2023/0068352 A1 · Magnetic sensor and magnetic sensor system

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- Number: US 2023/0068352 A1
- Document ID: US20230068352A1
- Status: Published application
- Kind: A1
- Application number: 17/896,859
- Filed: 2022-08-26
- Published: 2023-03-02
- Earliest claimed: 2021-08-30
- Assignees: TDK Corporation
- Applicants: TDK Corporation
- Inventors: Tetsuya HIRAKI; Kenzo MAKINO; Naoki OHTA
- Web page: https://patentgrep.com/patent/US20230068352A1

## CPC

- G01R 33/0094: {Sensor arrays}
- G01R 33/09: Magnetoresistive devices
- G01R 33/0005: {Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types (G01R33/0206 takes precedence)}
- G01R 33/0023: {Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration (G01R33/0017 takes precedence)}
- G01R 33/093: {using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00)}
- G01R 33/098: {comprising tunnel junctions, e.g. tunnel magnetoresistance sensors}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A magnetic sensor includes a first path and a second path, a plurality of structures, and a plurality of first electrodes and a plurality of second electrodes. The first path includes at least one first array. The second path includes at least one second array. The at least one first array and the at least one second array are disposed so that they are arranged in a first direction. The at least one first array and the at least one second array each include an odd number of structures disposed so that they are arranged in a second direction.

## Claims

### Claim 1

A magnetic sensor comprising:
a first path and a second path through each of which a current flows;
a plurality of structures disposed on the first path and the second path; and
a plurality of first electrodes and a plurality of second electrodes that connect the plurality of structures in series, wherein
the first path includes at least one first array,
the second path includes at least one second array,
the at least one first array and the at least one second array are disposed so as to be arranged in a first direction,
the at least one first array and the at least one second array each include an odd number of structures among the plurality of structures, the odd number of structures being disposed so as to be arranged in a second direction,
at least one of the odd number of structures is a structure including a magnetoresistive element, and
the plurality of first electrodes and the plurality of second electrodes are disposed at different positions in a third direction, and the first electrodes and the second electrodes are alternately arranged one by one in a direction in which the current flows in each of the at least one first array and the at least one second array.

### Claim 2 (depends on 1)

The magnetic sensor according to claim 1, wherein:
each of the odd number of structures has a first surface and a second surface located at both ends in the third direction;
the first surface is connected to one of the first electrodes; and
the second surface is connected to one of the second electrodes.

### Claim 3 (depends on 1)

The magnetic sensor according to claim 1, wherein a number of the first electrodes included in the at least one first array, a number of the second electrodes included in the at least one first array, a number of the first electrodes included in the at least one second array, and a number of the second electrodes included in the at least one second array are the same.

### Claim 4 (depends on 1)

The magnetic sensor according to claim 1, wherein each of the odd number of structures is a structure including the magnetoresistive element.

### Claim 5 (depends on 1)

The magnetic sensor according to claim 1, wherein at least one of the odd number of structures other than the structure including the magnetoresistive element is a connection structure configured to connect one of the first electrodes and one of the second electrodes.

### Claim 6 (depends on 1)

The magnetic sensor according to claim 1, wherein a number of magnetoresistive elements included in the first path and a number of magnetoresistive elements included in the second path are the same.

### Claim 7 (depends on 1)

The magnetic sensor according to claim 1, wherein:
the first path includes a plurality of first arrays as the at least one first array;
the second path includes a plurality of second arrays as the at least one second array; and
the plurality of first arrays and the plurality of second arrays are disposed so that the first arrays and the second arrays are alternately arranged one by one in the first direction.

### Claim 8 (depends on 7)

The magnetic sensor according to claim 7, wherein a number of magnetoresistive elements included in each of the first path and the second path is an even number.

### Claim 9 (depends on 1)

The magnetic sensor according to claim 1, wherein:
the at least one first array includes a first specific array located at an end in a direction parallel to the first direction;
the at least one second array includes a second specific array located at an end in the direction parallel to the first direction; and
when seen in the third direction, a direction in which the current flows through the first specific array and a direction in which the current flows through the second specific array are the same.

### Claim 10 (depends on 1)

The magnetic sensor according to claim 1, wherein:
the at least one first array includes a first specific array located at an end in a direction parallel to the first direction;
the at least one second array includes a second specific array located at an end in the direction parallel to the first direction; and
when seen in the third direction, a direction in which the current flows through the first specific array and a direction in which the current flows through the second specific array are opposite to each other.

### Claim 11 (depends on 1)

The magnetic sensor according to claim 1, further comprising at least one yoke formed of a soft magnetic material, wherein:
the at least one yoke has a first end face and a second end face located at both ends in the first direction;
the at least one first array is located near the first end face; and
the at least one second array is located near the second end face.

### Claim 12 (depends on 1)

The magnetic sensor according to claim 1, further comprising:
a power supply terminal;
one or two signal terminals,
one or two first signal paths connecting the power supply terminal and the one or two signal terminals; and
one or two second signal paths connecting the one or two signal terminals and a ground, wherein
the first path and the second path are two of the one or two first signal paths and the one or two second signal paths.

### Claim 13 (depends on 1)

The magnetic sensor according to claim 1, further comprising:
a first power supply terminal;
a second power supply terminal;
one or two first signal terminals;
one or two second signal terminals;
one or two first signal paths connecting the first power supply terminal and the one or two first signal terminals;
one or two second signal paths connecting the one or two first signal terminals and a ground;
one or two third signal paths connecting the second power supply terminal and the one or two second signal terminals; and
one or two fourth signal paths connecting the one or two second signal terminals and the ground, wherein
the first path is one of the one or two first signal paths and the one or two second signal paths, and
the second path is one of the one or two third signal paths and the one or two fourth signal paths.

### Claim 14 (depends on 1)

The magnetic sensor according to claim 1, wherein:
the first path further includes a first sub array disposed in the first path between one end of the first path and the at least one first array, and a second sub array disposed in the first path between another end of the first path and the at least one first array;
the second path includes a third sub array disposed in the second path between one end of the second path and the at least one second array, and a fourth sub array disposed in the second path between another end of the second path and the at least one second array;
each of the first sub array, the second sub array, the third sub array, and the fourth sub array includes as many structures as the odd number of structures among the plurality of structures;
the as many structures as the odd number of structures are disposed so as to be arranged in the second direction;
at least one of the as many structures as the odd number of structures is a structure including the magnetoresistive element; and
the first sub array and the one end of the first path, the second sub array and the other end of the first path, the third sub array and the one end of the second path, and the fourth sub array and the other end of the second path are connected by respective ones of the second electrodes.

### Claim 15 (depends on 1)

The magnetic sensor according to claim 1, wherein:
the first path further includes a plurality of first sub arrays disposed in the first path between one end of the first path and the at least one first array, and a plurality of second sub arrays disposed in the first path between another end of the first path and the at least one first array;
the second path further includes a plurality of third sub arrays disposed in the second path between one end of the second path and the at least one second array, and a plurality of fourth sub arrays disposed in the second path between another end of the second path and the at least one second array;
the first sub arrays, the second sub arrays, the third sub arrays, and the fourth sub arrays each include either more than one structure but fewer than the odd number of structures or one structure among the plurality of structures; and
each of the more than one structure but fewer than the odd number of structures or the one structure is a structure including the magnetoresistive element.

### Claim 16 (depends on 15)

The magnetic sensor according to claim 15, wherein:
a number of the structures included in each of the first sub arrays is smaller the closer the first sub array is to the one end of the first path;
a number of the structures included in each of the second sub arrays is smaller the closer the second sub array is to the other end of the first path;
a number of the structures included in each of the third sub arrays is smaller the closer the third sub array is to the one end of the second path; and
a number of the structures included in each of the fourth sub arrays is smaller the closer the fourth sub array is to the other end of the second path.

### Claim 17 (depends on 1)

The magnetic sensor according to claim 1, further comprising a plurality of electrode pads to which the first path and the second path are connected, wherein
the plurality of electrode pads are located at the same position in the third direction.

### Claim 18 (depends on 1)

The magnetic sensor according to claim 1, wherein a part of the first path and a part of the second path are located at different positions in the third direction and are connected to each other via a connection structure.

### Claim 19 (depends on 1)

The magnetic sensor according to claim 1, wherein the magnetic sensor is configured to detect a component of a target magnetic field in one direction.

### Claim 20 (depends on 1)

The magnetic sensor according to claim 1, wherein the magnetic sensor is configured to detect components of a target magnetic field in two directions.

### Claim 21 (depends on 1)

A magnetic sensor system comprising:
the magnetic sensor according to claim 1; and
a magnetic field generation unit configured to generate a predetermined magnetic field.
