# US 2023/0066484 A1 · Imprint apparatus, manufacturing method for article, and computer program > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2023/0066484 A1 - Document ID: US20230066484A1 - Status: Published application - Kind: A1 - Application number: 17/877,283 - Filed: 2022-07-29 - Published: 2023-03-02 - Earliest claimed: 2021-08-25 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Hirotoshi Torii - Web page: https://patentgrep.com/patent/US20230066484A1 ## CPC - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract [Problem] The provision of an imprint apparatus that is beneficial in improving the overlap precision of a mold and resin on a substrate. [Method for Solving the Problem] In an imprint apparatus, which is configured so as to transfer a pattern from a mold onto a resin surface by pressing the mold onto the resin that is disposed on the substate surface, has a magnification correction mechanism including actuators for applying a force to a side of the mold via a contact member, and correcting the shape of a patterned portion that has been formed on the mold; and displacement members displaceable by fluid pressure for changing an initial position for starting correction of the contact members of the magnification correction unit according to a size of the mold. ## Claims ### Claim 1 An imprint apparatus configured to transfer a pattern from a mold onto resin by pressing the mold onto the resin on a surface of a substrate, the imprint apparatus having: a magnification correction mechanism including actuators for applying a force to a side of the mold via a contact member and correcting a shape of a patterned portion that has been formed on the mold; and displacement members displaceable by fluid pressure for changing an initial position for starting correction of the contact member of the magnification correction mechanism according to the size of the mold. ### Claim 2 (depends on 1) The imprint apparatus according to claim 1, wherein, the displacement members have a pressure adjusting unit for adjusting the fluid pressure, and the pressure adjusting unit changes a distance between the contact members and the side of the mold using the displacement members by adjusting the fluid pressure. ### Claim 3 (depends on 2) The imprint apparatus according to claim 2, wherein when the mold is exchanged, the pressure adjusting unit displaces the contact members and the side of the mold in separate directions. ### Claim 4 (depends on 3) The imprint apparatus according to claim 3, wherein after the mold has been installed, the pressure adjusting unit performs an adjustment operation so as to adjust the initial position by displacing the displacement members. ### Claim 5 (depends on 1) The imprint apparatus according to claim 1, wherein along with having a mold holding member configured so as to hold the mold, the magnification correction mechanism has a lever and a hinge, wherein the lever is able to rotate centered on the hinge, and the displacement members are provided between at least one of the hinge and the mold holding member, and between the actuator and the mold holding member. ### Claim 6 (depends on 5) The imprint apparatus according to claim 5, wherein different displacement members are disposed between each of the hinge and the mold holding member and between the actuator and the mold holding member, and a shared fluid pressure is provided to the displacement members. ### Claim 7 (depends on 2) The imprint apparatus according to claim 2, wherein the pressure adjusting unit sets the fluid pressure based on a gap amount between the side of the mold and the contact member. ### Claim 8 (depends on 2) The imprint apparatus according to claim 2, wherein a resolution of the correction of the shape by the magnification correction mechanism is higher than a resolution of the displacement of the displacement member by the pressure adjusting unit. ### Claim 9 (depends on 2) The imprint apparatus according to claim 2, wherein a responsivity of the correction of the shape by the magnification correction mechanism is higher than a responsivity of a displacement of the displacement members by the pressure adjusting unit. ### Claim 10 (depends on 2) The imprint apparatus according to claim 2, wherein the actuators are disposed on four sides of the mold, and the pressure adjustment unit provides shared fluid pressure to the displacement members that have been disposed on at least 2 opposing surfaces of the sides of the mold. ### Claim 11 (depends on 1) The imprint apparatus according to claim 1, wherein the displacement members are displaced parallelly to an expansion direction of the actuators. ### Claim 12 (depends on 1) The imprint apparatus according to claim 1, wherein the displacement members are disposed making a position on one edge of the actuators displaceable. ### Claim 13 (depends on 1) The imprint apparatus according to claim 1, comprising a stopper for limiting an upper limit of a deformation amount of the displacement members. ### Claim 14 (depends on 1) The imprint apparatus according to claim 1, wherein the actuators include piezo elements. ### Claim 15 (depends on 1) The imprint apparatus according to claim 1, wherein the displacement members are displaceable by air pressure. ### Claim 16 A manufacturing method for an article comprising: a pattern forming process configured to form a pattern on resin on top of a substrate by using an imprint apparatus configured to transfer the pattern of a mold onto resin by pressing the mold onto the resin on a surface of a substrate, an imprint apparatus having a magnification correction mechanism including actuators for applying a force to a side of the mold via a contact member, and correcting a shape of a patterned portion that has been formed on the mold; and displacement members that are displaceable using fluid pressure for changing an initial position for starting correction of the contact members of the magnification correction mechanism according to a size of the mold; and a fabrication process configured to fabricate a substrate on which the pattern has been formed during the pattern forming process. ### Claim 17 A computer readable storage medium on which a program has been stored in which a computer executes an imprint process for an imprint apparatus configured so as to transfer a pattern of a mold to resin by pressing the mold onto the resin on a surface of a substrate, wherein the computer readable storage medium on which the program has been stored is characterized in that the computer executes an imprint method having: a magnification correction process configured to correct a shape of a patterned portion by using a magnification correction mechanism including an actuator for applying a force to a side of the mold via a contact member and correcting the shape of the patterned portion that has been formed on the mold; and an adjustment process configured to change an initial position for starting correction of the contact member of the magnification correction mechanism according to the size of the mold using displacement members displaceable by fluid pressure.