Systems and methods for adaptive troubleshooting of semiconductor manufacturing equipment
AssigneeApplied Materials, Inc.
InventorsMilind Jayram Gadre, Prashanth Kumar
Life of this patent
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Abstract
A system includes a processing device, operatively coupled to the memory device, to perform operations comprising obtaining a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate; generating a manufacturing data graph based on the plurality of sensor values; receiving, via a user interface, a selection of a data point on the manufacturing graph; receiving failure data associated with the data point; and storing, in a data structure, the failure data to be accessible via the user interface presenting the manufacturing data graph.
Claims20
A system comprising:
- a memory;
- and
- a processing device, operatively coupled to the memory device, to perform operations comprising:
- obtaining a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate;
- generating a manufacturing data graph based on the plurality of sensor values;
- receiving, via a user interface, a selection of a data point on the manufacturing data graph;
- receiving failure data associated with the data point;
- and
- storing, in a data structure, the failure data to be accessible via the user interface presenting the manufacturing data graph.
A method comprising:
- obtaining, by a processor, a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate;
- generating a manufacturing graph based on the plurality of sensor values;
- receiving, via a user interface, a selection of a data point on the manufacturing data graph;
- receiving failure data associated with the data point;
- and
- storing, in a data structure, the failure data to be accessible via the user interface presenting the manufacturing data graph.
A method, comprising:
- obtaining, by a processor, a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate;
- applying a machine-learning model to the plurality of sensor values, the machine-learning model trained based on historical sensor data of a sub-system of the process chamber and task data associated with the recipe for depositing the film;
- generating an output of the machine-learning model, wherein the output is indicative of a type of failure of the sub-system;
- and
- generating a corrective action based on the type of failure of the sub-system.
Dependencies are inferred from the claim text.