Pattern inspection apparatus and pattern inspection method
AssigneeOxide Corporation
InventorShinichi IMAI
Life of this patent
Estimating the term…
Abstract
A pattern inspection apparatus includes a light source, a detector, and an inspection unit. The light source is configured to emit light toward an inspection target including stacked silicon substrates. The light has a wavelength band that is greater than or equal to 1.2 micrometers and less than or equal to 5.0 micrometers. The detector is configured to detect transmitted light of the inspection target or reflected light of the inspection target out of the light emitted from the light source. The transmitted light is light transmitted through the inspection target. The reflected light is light reflected by the inspection target. The inspection unit is configured to perform pattern inspection on the basis of a detection result obtained by the detector.
Claims8
A pattern inspection apparatus comprising:
- a light source configured to emit light toward an inspection target including stacked silicon substrates, the light having a wavelength band that is greater than or equal to 1.2 micrometers and less than or equal to 5.0 micrometers;
- a detector configured to detect transmitted light of the inspection target or reflected light of the inspection target out of the light emitted from the light source, the transmitted light being light transmitted through the inspection target, the reflected light being light reflected by the inspection target;
- and
- an inspection unit configured to perform pattern inspection on a basis of a detection result obtained by the detector.
A pattern inspection method comprising:
- emitting light toward an inspection target including stacked silicon substrates, the light having a wavelength band that is greater than or equal to 1.2 micrometers and less than or equal to 5.0 micrometers;
- detecting transmitted light of the inspection target or reflected light of the inspection target out of the light emitted toward the inspection target, the transmitted light being light transmitted through the inspection target, the reflected light being light reflected by the inspection target;
- and
- performing pattern inspection on a basis of a detection result obtained by the detecting.
Dependencies are inferred from the claim text.