# US 2023/0057796 A1 · Control apparatus, lithography apparatus, and article manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2023/0057796 A1 - Document ID: US20230057796A1 - Status: Published application - Kind: A1 - Application number: 17/880,767 - Filed: 2022-08-04 - Published: 2023-02-23 - Earliest claimed: 2021-08-20 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Mitsuhide Nishimura; Junichi Motojima; Tsutomu Terao - Web page: https://patentgrep.com/patent/US20230057796A1 ## CPC - G03F 7/70725: {control} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A control apparatus for performing position control of a moving object is provided. The apparatus includes a feedforward controller configured to perform feedforward control by giving a feedforward manipulated variable to the moving object. In a case that a duration of the feedforward control exceeds a predetermined time, the feedforward controller continues the feedforward control using a feedforward manipulated variable obtained based on a feedforward manipulated variable used in a predetermined section including an end of the predetermined time. ## Claims ### Claim 1 A control apparatus for performing position control of a moving object, the apparatus comprising a feedforward controller configured to perform feedforward control by giving a feedforward manipulated variable to the moving object, wherein in a case that a duration of the feedforward control exceeds a predetermined time, the feedforward controller continues the feedforward control using a feedforward manipulated variable obtained based on a feedforward manipulated variable used in a predetermined section including an end of the predetermined time. ### Claim 2 (depends on 1) The apparatus according to claim 1, wherein until the predetermined time, the feedforward controller uses a plurality of feedforward manipulated variables for each time series obtained in advance, and after the predetermined time elapses, the feedforward controller uses a feedforward manipulated variable obtained by extrapolation based on the feedforward manipulated variable used in the predetermined section. ### Claim 3 (depends on 2) The apparatus according to claim 2, further comprising a storage unit configured to store the plurality of feedforward manipulated variables for each time series obtained in advance, and the feedforward manipulated variable obtained by the extrapolation, wherein the predetermined time is a time determined in accordance with a storage capacity of the storage unit. ### Claim 4 (depends on 2) The apparatus according to claim 2, wherein the extrapolation is performed by performing function approximation of a time-series transition of the feedforward manipulated variables in the predetermined section, and predicting, by the function approximation, a feedforward manipulated variable after the predetermined time elapses. ### Claim 5 (depends on 2) The apparatus according to claim 2, wherein the extrapolation is performed by obtaining, as a feedforward manipulated variable after the predetermined time elapses, an average value of the feedforward manipulated variables used in the predetermined section. ### Claim 6 (depends on 2) The apparatus according to claim 2, wherein the extrapolation is performed by obtaining, as a feedforward manipulated variable after the predetermined time elapses, a feedforward manipulated variable used at the end of the predetermined time. ### Claim 7 (depends on 2) The apparatus according to claim 2, wherein the extrapolation is performed in accordance with to a method selected from a first method of performing function approximation of a time-series transition of feedforward manipulated variables in the predetermined section, and predicting, by the function approximation, a feedforward manipulated variable after the predetermined time elapses, a second method of obtaining, as the feedforward manipulated variable after the predetermined time elapses, an average value of the feedforward manipulated variables used in the predetermined section, and a third method of obtaining, as the feedforward manipulated variable after the predetermined time elapses, a feedforward manipulated variable used at the end of the predetermined time. ### Claim 8 (depends on 7) The apparatus according to claim 7, further comprising a selection unit configured to select one method of the first method, the second method, and the third method in accordance with a user operation. ### Claim 9 (depends on 2) The apparatus according to claim 2, wherein first-order approximation of a time-series transition of feedforward manipulated variables in the predetermined section is performed, and it is determined whether a slope of a straight line obtained by the first-order approximation is not more than a threshold value, in a case that the slope is not more than the threshold value, the extrapolation is performed by obtaining, as a feedforward manipulated variable after the predetermined time elapses, a feedforward manipulated variable used at the end of the predetermined time, and in a case that the slope is more than the threshold value, the extrapolation is performed by performing function approximation of the time-series transition of the feedforward manipulated variables in the predetermined section, and predicting, by the function approximation, a feedforward manipulated variable after the predetermined time elapses. ### Claim 10 (depends on 1) The apparatus according to claim 1, further comprising a feedback controller configured to perform feedback control on the moving object so as to reduce a position error from a target position, wherein the feedforward controller performs the feedforward control on the moving object on which the feedback control is performed by the feedback controller. ### Claim 11 (depends on 1) A lithography apparatus for performing a process of transferring a pattern of an original onto a substrate, wherein a control apparatus defined in claim 1 is used to perform position control of a stage serving as a moving object which moves while holding the substrate. ### Claim 12 (depends on 11) An article manufacturing method comprising: transferring a pattern of an original onto a substrate using a lithography apparatus defined in claim 11; and processing the substrate having undergone the transferring, wherein an article is obtained from the substrate having undergone the processing.