# US 2023/0057734 A1 · Piezoelectric Element, Liquid Ejecting Head, And Liquid Ejecting Apparatus

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- Number: US 2023/0057734 A1
- Document ID: US20230057734A1
- Status: Published application
- Kind: A1
- Application number: 17/891,400
- Filed: 2022-08-19
- Published: 2023-02-23
- Earliest claimed: 2021-08-20
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Kazuya KITADA
- Web page: https://patentgrep.com/patent/US20230057734A1

## CPC

- H10N 30/708: {Intermediate layers, e.g. barrier, adhesion or growth control buffer layers}
- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- H10N 30/2047: {Membrane type}
- H10N 30/8542: {Alkali metal based oxides, e.g. lithium, sodium or potassium niobates}
- H10N 30/8554: {Lead-zirconium titanate [PZT] based}
- B41J 2002/14362: {Assembling elements of heads}
- B41J 2002/14419: {Manifold}
- B41J 2202/03: Specific materials used
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

A piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are stacked on a substrate is provided. The piezoelectric element is a piezoelectric element in which the first electrode, the piezoelectric layer, and the second electrode are stacked in order on the substrate and includes an orientation control layer that is provided between the piezoelectric layer and the first electrode and that controls orientation of the piezoelectric layer and a titanium layer that is provided between the first electrode and the orientation control layer and that contains at least Ti.

## Claims

### Claim 1

A piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are stacked in order on a substrate, the piezoelectric element comprising:
an orientation control layer that is provided between the piezoelectric layer and the first electrode and controls orientation of the piezoelectric layer; and
a titanium layer that is provided between the first electrode and the orientation control layer and contains at least Ti.

### Claim 2 (depends on 1)

The piezoelectric element according to claim 1, wherein
the titanium layer has a function of canceling an influence of orientation which is applied from the first electrode to the piezoelectric layer.

### Claim 3 (depends on 1)

The piezoelectric element according to claim 1, wherein
na<nt, wherein an amount of substance of a metallic element that is contained in the titanium layer and differs from Ti is na and an amount of substance of Ti contained in the titanium layer is nt.

### Claim 4 (depends on 3)

The piezoelectric element according to claim 3, wherein
na≤0.4×nt.

### Claim 5 (depends on 3)

The piezoelectric element according to claim 3, wherein
na≤0.2×nt.

### Claim 6 (depends on 1)

The piezoelectric element according to claim 1, wherein
the orientation control layer contains at least one of Pb and Bi.

### Claim 7 (depends on 6)

The piezoelectric element according to claim 6, wherein
the orientation control layer contains Pb, Bi, Fe, and Ti.

### Claim 8 (depends on 6)

The piezoelectric element according to claim 6, wherein
the orientation control layer contains Pb, Fe, and Ti and does not contain Bi.

### Claim 9 (depends on 6)

The piezoelectric element according to claim 6, wherein
the orientation control layer contains Bi, Fe, and Ti and does not contain Pb.

### Claim 10 (depends on 7)

The piezoelectric element according to claim 7, wherein
a content ratio of Ti of the titanium layer which is measured by EDX analysis is higher than a content ratio of Ti of the orientation control layer which is measured by EDX analysis.

### Claim 11 (depends on 7)

The piezoelectric element according to claim 7, wherein
the titanium layer contains Fe, and
a content ratio of Fe of the titanium layer which is measured by EDX analysis is lower than a content ratio of Fe of the orientation control layer which is measured by EDX analysis.

### Claim 12 (depends on 11)

The piezoelectric element according to claim 11, wherein
the content ratio of Fe of the titanium layer which is measured by EDX analysis is higher than a content ratio of Fe of the first electrode which is measured by EDX analysis.

### Claim 13 (depends on 1)

The piezoelectric element according to claim 1, wherein
when a region in which the piezoelectric layer is interposed between the first electrode and the second electrode is a first region and a region in which the piezoelectric layer is not interposed between the first electrode and the second electrode is a second region,
a thickness of the titanium layer in the first region is larger than a thickness of the titanium layer in the second region.

### Claim 14 (depends on 1)

The piezoelectric element according to claim 1, wherein
the orientation control layer is a composite oxide having a perovskite structure.

### Claim 15 (depends on 1)

The piezoelectric element according to claim 1, wherein
a thickness of the titanium layer is not less than 1 nm and not more than 30 nm, and
a thickness of the orientation control layer is not less than 5 nm and not more than 200 nm.

### Claim 16

A piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are stacked in order on a substrate, the piezoelectric element comprising:
an orientation control layer that is provided between the piezoelectric layer and the first electrode and controls orientation of the piezoelectric layer; and
a canceling layer that is provided between the first electrode and the orientation control layer and has a function of canceling an influence of orientation which is applied from the first electrode to the piezoelectric layer.

### Claim 17 (depends on 1)

The piezoelectric element according to claim 1, wherein
the piezoelectric layer contains Pb, Zr, and Ti.

### Claim 18 (depends on 1)

The piezoelectric element according to claim 1, wherein
the piezoelectric layer contains K, Na, and Nb.

### Claim 19 (depends on 1)

A liquid ejecting head comprising:
the piezoelectric element according to claim 1; and
a diaphragm that vibrates when the piezoelectric element is driven.

### Claim 20 (depends on 19)

A liquid ejecting apparatus comprising:
the liquid ejecting head according to claim 19; and
a control section that controls operation of the liquid ejecting head.