# US 2023/0056833 A1 · Optical device and optical communication apparatus

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- Number: US 2023/0056833 A1
- Document ID: US20230056833A1
- Status: Published application
- Kind: A1
- Application number: 17/862,903
- Filed: 2022-07-12
- Published: 2023-02-23
- Earliest claimed: 2021-08-23
- Assignees: Fujitsu Optical Components Limited
- Applicants: Fujitsu Optical Components Limited
- Inventors: Masaki SUGIYAMA
- Web page: https://patentgrep.com/patent/US20230056833A1

## CPC

- G02F 1/0356: {controlled by a high-frequency electromagnetic wave component in an electric waveguide structure}
- G02F 1/212: {Mach-Zehnder type}
- G02F 1/2255: {controlled by a high-frequency electromagnetic component in an electric waveguide structure}
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

An optical device includes an optical waveguide that is a rib type and that is formed of a thin film lithium niobate (LiNbO3: LN) substrate using a thin film LN crystal, and a buffer layer that is laminated on the optical waveguide. Furthermore, the optical device includes an electrode that is laminated on the buffer layer and that applies a voltage to the optical waveguide, and a gettering site that is disposed parallel to the optical waveguide and that traps an electric charge inside the optical waveguide.

## Claims

### Claim 1

An optical device comprising:
an optical waveguide that is a rib type and that is formed of a thin film lithium niobate (LiNbO3: LN) substrate using a thin film LN crystal;
a buffer layer that is laminated on the optical waveguide;
an electrode that is laminated on the buffer layer and that applies a voltage to the optical waveguide; and
a gettering site that is disposed parallel to the optical waveguide and that traps an electric charge inside the optical waveguide.

### Claim 2 (depends on 1)

The optical device according to claim 1, wherein
the electrode is a direct current (DC) electrode, and
two gettering sites are disposed in parallel so as to sandwich the DC electrode, one of two gettering sites being a first gettering site that traps a positive electric charge present in the optical waveguide, and the other of two gettering sites being a second gettering site that traps a negative electric charge present in the optical waveguide.

### Claim 3 (depends on 1)

The optical device according to claim 1, wherein the gettering site is disposed in a Z-axis direction of orientation of the thin film LN crystal of the optical waveguide.

### Claim 4 (depends on 1)

The optical device according to claim 1, further comprising:
an opening portion that is opened in the buffer layer and the thin film LN substrate that are located below a position in which the gettering site is disposed, wherein
the gettering site is laminated in the opening portion.

### Claim 5 (depends on 4)

The optical device according to claim 4, wherein the thin film LN substrate that is exposed on the opening portion side is structured to have substantially a same thickness as a rib included in the optical waveguide corresponding to the thin film LN substrate.

### Claim 6 (depends on 4)

The optical device according to claim 4, further comprising:
a first joining unit that has a comb tooth shape and that is included in the gettering site; and
a second joining unit that is formed on the thin film LN substrate and the buffer layer on the opening portion side, that is joined to the first joining unit, and that has a comb tooth shape, wherein
a portion between the gettering site and the thin film LN substrate are joined as a result of the first joining unit being engaged with the second joining unit.

### Claim 7 (depends on 4)

The optical device according to claim 4, further comprising:
a first joining unit that has a saw tooth shape and that is included in the gettering site; and
a second joining unit that is formed on the thin film LN substrate and the buffer layer on the opening portion side, that is joined to the first joining unit, and that has a saw tooth shape, wherein
a portion between the gettering site and the thin film LN substrate are joined as a result of the first joining unit being engaged with the second joining unit.

### Claim 8 (depends on 1)

The optical device according to claim 1, wherein
the electrode is a radio frequency (RF) electrode, and
two gettering sites are disposed in parallel so as to sandwich the RF electrode, one of two gettering sites being a first gettering site that traps a positive electric charge present in the optical waveguide, and the other of two gettering sites being a third gettering site that traps a negative electric charge present in the optical waveguide.

### Claim 9 (depends on 1)

The optical device according to claim 1, wherein the gettering site is formed of a material including polysilicon.

### Claim 10 (depends on 1)

The optical device according to claim 1, wherein the gettering site is formed of a material including silicon nitride.

### Claim 11

An optical communication apparatus comprising:
a processor that executes signal processing on an electrical signal;
a light source that emits light; and
an optical device that modulates, by using the electrical signal output from the processor, the light emitted from the light source, wherein
the optical device includes
an optical waveguide that is a rib type and that is formed of a thin film lithium niobate (LiNbO3: LN) substrate using a thin film LN crystal;
a buffer layer that is laminated on the optical waveguide;
an electrode that is laminated on the buffer layer and that applies a voltage to the optical waveguide; and
a gettering site that is disposed parallel to the optical waveguide and that traps an electric charge inside the optical waveguide.