Vacuum pump, detoxifying device, and exhaust gas processing system
AssigneeEdwards Japan Limited
InventorYoshihiro Enomoto
Life of this patent
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Abstract
Provided is a vacuum pump that can realize energy conservation when performing abatement of exhaust gas. A vacuum pump that sucks in and exhausts exhaust gas includes a motor serving as a drive source, and a first controller that controls driving of the motor. The first controller monitors a state of the motor, and in a case in which the state of the motor is a specific state excluding when starting up and when stopped, outputs a specific signal (process signal) to an external entity.
Claims9
A vacuum pump that sucks in and exhausts exhaust gas, the vacuum pump comprising:
- a motor serving as a drive source;
- and
- a first controller that controls driving of the motor, wherein
- the first controller monitors a state of the motor, and in a case in which the state of the motor is a specific state, outputs a specific signal to an external entity.
An abatement device that is installed in a system in which exhaust gas exhausted from a plurality of vacuum pumps is collected, and performs abatement of the exhaust gas exhausted from the plurality of vacuum pumps, the abatement device comprising:
- a combustion furnace that performs combustion of the exhaust gas;
- a solenoid valve that opens and closes to supply fuel gas to the combustion furnace;
- and
- a second controller that controls opening and closing actions of the solenoid valve, wherein
- the second controller controls an opening degree of the solenoid valve on the basis of a total count of signals input from the plurality of vacuum pumps.
An abatement device that is installed in a system in which exhaust gas exhausted from a plurality of vacuum pumps is collected, and performs abatement of the exhaust gas exhausted from the plurality of vacuum pumps, the abatement device comprising:
- a combustion furnace that performs combustion of the exhaust gas;
- a solenoid valve that opens and closes to supply fuel gas to the combustion furnace;
- and
- a second controller that controls opening and closing actions of the solenoid valve, wherein
- the second controller controls an opening degree of the solenoid valve on the basis of a total value of motor currents input from the plurality of vacuum pumps.
An exhaust gas treatment system, comprising:
- a vacuum pump that sucks in and exhausts exhaust gas;
- and
- an abatement device that performs abatement of the exhaust gas exhausted from the vacuum pump, wherein:
- the vacuum pump includes
- a motor serving as a drive source, and
- a first controller that controls driving of the motor,
- the abatement device includes
- a combustion furnace that performs combustion of the exhaust gas;
- a solenoid valve that opens and closes to supply fuel gas to the combustion furnace, and
- a second controller that controls opening and closing actions of the solenoid valve,
- the first controller monitors a state of the motor, and in a case in which the state of the motor is a specific state excluding when starting up and when stopped, outputs a specific signal to the second controller, and
- the second controller controls opening and closing of the solenoid valve on the basis of the specific signal from the first controller.
Dependencies are inferred from the claim text.