# US 2023/0054970 A1 · Leak test device

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- Number: US 2023/0054970 A1
- Document ID: US20230054970A1
- Status: Published application
- Kind: A1
- Application number: 17/441,789
- Filed: 2021-06-30
- Published: 2023-02-23
- Earliest claimed: 2020-10-29
- Assignees: Changxin Memory Technologies, Inc.
- Applicants: Changxin Memory Technologies, Inc.
- Inventors: Jiaping HE; Chin-Chung KU
- Web page: https://patentgrep.com/patent/US20230054970A1

## CPC

- G01M 3/26: by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- B24B 7/22: for grinding inorganic material, e.g. stone, ceramics, porcelain
- G01M 3/3272: {for verifying the internal pressure of closed containers}
- G01M: TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS

## Abstract

The present disclosure provides a leak test device, including: a test platform, the test platform being configured to carry and place a polishing head to be tested for leak, the polishing head being divided into one or more independent partitions, each of the partitions having a chamber correspondingly, and each chamber having vents correspondingly; an upper cover for sealing the chambers, the upper cover being located on the side of the chambers away from the test platform; and a movable device, the movable device being movable on a surface parallel to the test platform, movable in a direction perpendicular to the test platform, and also adapted to apply pressure on the upper cover so that the upper cover seals the chambers.

## Claims

### Claim 1

A leak test device, the leak test device comprising:
a test platform, the test platform being configured to carry and place a polishing head to be tested for leak, the polishing head being divided into one or more independent partitions, each of the partitions having a chamber correspondingly, and each chamber having vents correspondingly;
an upper cover for sealing the chambers, the upper cover being located on a side of the chambers away from the test platform; and
a movable device, the movable device being movable on a surface parallel to the test platform, movable in a direction perpendicular to the test platform, and also adapted to apply pressure on the upper cover so that the upper cover seals the chambers.

### Claim 2 (depends on 1)

The leak test device according to claim 1, the leak test device further comprising a fixed platform for carrying the test platform; wherein the movable device comprises: a fixed shaft, one end of the fixed shaft being fixed on the fixed platform; a rotating shaft, one end of the rotating shaft being connected to the other end of the fixed shaft, and being rotatable around the fixed shaft; and a pressing device, the pressing device being connected to the other end of the rotating shaft, and after the rotating shaft rotating to a preset position, the pressing device being in contact with the upper cover and applying pressure on the upper cover.

### Claim 3 (depends on 2)

The leak test device according to claim 2, the leak test device further comprising a limiting component, wherein the limiting component is disposed at a connection between the fixed shaft and the rotating shaft, and is configured to fix the position of the rotating shaft after the rotating shaft rotates to the preset position.

### Claim 4 (depends on 2)

The leak test device according to claim 2, wherein the pressing device comprises at least one pressing head and at least one pneumatic cylinder, the pressing head is adapted to contact the upper cover, and the pneumatic cylinder is configured to control the pressing head to press and rise.

### Claim 5 (depends on 4)

The leak test device according to claim 4, wherein the pressing device comprises a pressing head, and after the rotating shaft rotates to the preset position, a central axis of the pressing head coincides with a central axis of the upper cover.

### Claim 6 (depends on 4)

The leak test device according to claim 4, wherein the pressing device comprises a plurality of the pressing heads, and after the rotating shaft rotates to the preset position, the plurality of pressing heads are uniformly arranged around a central axis of the upper cover at intervals.

### Claim 7 (depends on 5)

The leak test device according to claim 5, the leak test device further comprising: a control module, the control module being adapted to control the pneumatic cylinder; a first button, located on the fixed platform and connected to the control module, the first button being pressed such that the control module controls the pneumatic cylinder to press; and a second button, located on the fixed platform and connected to the control module, the second button being pressed such that the control module controls the pneumatic cylinder to rise.

### Claim 8 (depends on 5)

The leak test device according to claim 5, the leak test device further comprising a pressure regulating valve disposed at an output end of the pneumatic cylinder, the pressure regulating valve being configured to control pressure applied by the pressing head to the upper cover.

### Claim 9 (depends on 5)

The leak test device according to claim 5, the pressing device further comprising a spherical universal joint, the spherical universal joint being disposed on a side of the pressing head away from the upper cover.

### Claim 10 (depends on 1)

The leak test device according to claim 1, the leak test device further comprising: a carrier platform and an air source point, wherein the carrier platform comprises at least one test platform and at least one control device, the air source point is connected to the control device, and the control device is configured to provide air to the polishing head and to display a leak test result of the polishing head; and
air intake devices, wherein the air intake devices are disposed on a side of the upper cover away from the polishing head, the air intake devices are communicated with the vents, and the air intake devices are connected to the control device.

### Claim 11 (depends on 10)

The leak test device according to claim 10, wherein the control device comprises a plurality of air source output ends, and at least one air source output end is connected to one air intake device through a pipe.

### Claim 12 (depends on 11)

The leak test device according to claim 11, wherein the at least one air source output end is provided with a first adapter, the first adapter shunts air provided by the air source output end into at least two pipes, and one pipe is communicated with one air intake device.

### Claim 13 (depends on 11)

The leak test device according to claim 11, wherein the control device further comprises a plurality of pressure sensors, and the pressure sensors are arranged in a one-to-one correspondence with the air source output ends.

### Claim 14 (depends on 13)

The leak test device according to claim 13, wherein the control device further comprises a plurality of display devices, and the display devices are arranged in a one-to-one correspondence with the pressure sensors.

### Claim 15 (depends on 6)

The leak test device according to claim 6, the leak test device further comprising: a control module, the control module being adapted to control the pneumatic cylinder; a first button, located on the fixed platform and connected to the control module, the first button being pressed such that the control module controls the pneumatic cylinder to press; and a second button, located on the fixed platform and connected to the control module, the second button being pressed such that the control module controls the pneumatic cylinder to rise.

### Claim 16 (depends on 6)

The leak test device according to claim 6, the leak test device further comprising a pressure regulating valve disposed at an output end of the pneumatic cylinder, the pressure regulating valve being configured to control pressure applied by the pressing head to the upper cover.

### Claim 17 (depends on 6)

The leak test device according to claim 6, the pressing device further comprising a spherical universal joint, the spherical universal joint being disposed on a side of the pressing head away from the upper cover.
