# US 2023/0054793 A1 · Machined interposer to enable large scale high frequency connectivity

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- Number: US 2023/0054793 A1
- Document ID: US20230054793A1
- Status: Published application
- Kind: A1
- Application number: 17/445,259
- Filed: 2021-08-17
- Published: 2023-02-23
- Earliest claimed: 2021-08-17
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Muir Kumph
- Web page: https://patentgrep.com/patent/US20230054793A1

## CPC

- H01P 7/06: Cavity resonators
- H01P 5/12: Coupling devices having more than two ports (H01P5/04 takes precedence)
- H10W 44/20: at high-frequency [HF] or radio frequency [RF]
- H10W 70/65: Shapes or dispositions of interconnections
- H10W 70/68: Shapes or dispositions thereof
- H10W 70/698: Semiconductor materials that are electrically insulating, e.g. undoped silicon
- H10W 44/216: {Waveguides, e.g. strip lines}
- H10W 76/10: Containers or parts thereof
- H10W 76/132: having other interconnections through an insulated passage in the conductive base
- H01P: WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE (operating at optical frequencies G02B)
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

An apparatus comprising an interposer mounted to a conductive holder and a plurality of microwave cavities, wherein each microwave cavity of the plurality of microwave cavities is comprised of a fin section having two sidewalls, wherein each sidewall is comprised of a vane that extends up from the conductive holder through the interposer.

## Claims

### Claim 1

An apparatus comprising:
an interposer, wherein the interposer is divided into a plurality of fin sections by a plurality of grooves, wherein a fin of the plurality of fins is defined by a first groove and a second groove, wherein the fin is located between the first groove and the second groove, wherein each groove extends from the center of the interposer to an outer edge of the interposer, wherein each groove exposes the ground plane of the interposer along the length of the groove;
a chip mounted to the interposer; and
a plurality of connecters mounted on the interposer, wherein the plurality of connector electrically connected to chip, wherein at least one connector of the plurality of connectors are mounted in each of the plurality of fin sections.

### Claim 2

An apparatus comprising:
an interposer mounted to a conductive holder, wherein the silicon interposer is divided into a plurality of fin sections by a plurality of grooves;
the conductive holder includes a first section to receive the interposer; and
the first section includes a plurality of vanes that extends up from the top surface of the first section within the conductive holder, wherein each vane of the plurality of vanes extends through one of the plurality of grooves.

### Claim 3 (depends on 2)

The apparatus of claim 2, further comprising:
a chip mounted to the interposer;
a plurality of coaxial connecters mounted on the interposer, wherein the plurality of coaxial connector are electrically connected to chip, wherein at least one coaxial connector of the plurality of coaxial connectors are mounted in each of the plurality of fin sections.

### Claim 4 (depends on 2)

The apparatus of claim 2, wherein each groove of the plurality of grooves extends from the center of the interposer to an outer edge of the interposer.

### Claim 5 (depends on 4)

The apparatus of claim 4, wherein the spacing between two adjacent grooves of the plurality of grooves defines the width of one of the fin sections of the plurality of fin sections.

### Claim 6 (depends on 2)

The apparatus of claim 2, wherein a sidewall of the each of the plurality of fin sections are defined by one of the plurality of grooves.

### Claim 7 (depends on 6)

The apparatus of claim 6, wherein each groove extends from the center of the interposer to an outer edge of the interposer.

### Claim 8 (depends on 7)

The apparatus of claim 7, wherein each groove of the plurality of grooves exposes a ground plane of the interposer along the length each groove of the plurality of grooves.

### Claim 9 (depends on 8)

The apparatus of claim 8, wherein each of the plurality of vanes that extends through each of the plurality of grooves is connected to the ground plane of the interposer.

### Claim 10 (depends on 9)

The apparatus of claim 9, further comprising:
a microwave cavity comprised of one fin section of the plurality of fin section having two sidewalls, wherein each sidewall is comprised of one vane of the plurality of vanes that are connected to the ground plane of the interposer.

### Claim 11 (depends on 9)

The apparatus of claim 9, further comprising:
a plurality of microwave cavities, wherein each microwave cavity of the plurality of microwave cavities is comprised of one fin section of the plurality of fin sections having two sidewalls, wherein each sidewall is comprised of one vanes of the plurality of vanes that are connected to the ground plane of the interposer.

### Claim 12 (depends on 2)

The apparatus of claim 2, wherein the interposer is comprised of a silicon interposer.

### Claim 13 (depends on 2)

The apparatus of claim 2, wherein the conductive holder is comprised of copper.

### Claim 14

An apparatus comprising:
an interposer mounted to a conductive holder; and
a plurality of microwave cavities, wherein each microwave cavity of the plurality of microwave cavities is comprised of a fin section having two sidewalls, wherein each sidewall is comprised of a vane that extends up from the conductive holder through the interposer.

### Claim 15 (depends on 14)

The apparatus of claim 14, wherein each vane that extends through the interposer is connected to a ground plane of the interposer.

### Claim 16 (depends on 14)

The apparatus of claim 14, wherein the interposer further includes a plurality of grooves, wherein each of the plurality of grooves receives one of the vanes that extends up from the conductive holder.

### Claim 17 (depends on 16)

The apparatus of claim 16, wherein each groove of the plurality of grooves extends from the center of the interposer to an outer edge of the interposer.

### Claim 18 (depends on 14)

The apparatus of claim 14, further comprising:
a chip mounted to the interposer;
at least one coaxial connecters mounted on the fin section of the interposer, wherein the at least one coaxial connector is electrically connected to chip.
