# US 2023/0054779 A1 · Detection method for seized traveling lift pins in wafer processing reactor systems > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2023/0054779 A1 - Document ID: US20230054779A1 - Status: Published application - Kind: A1 - Application number: 17/887,646 - Filed: 2022-08-15 - Published: 2023-02-23 - Earliest claimed: 2021-08-18 - Assignees: ASM IP Holding B.V. - Applicants: ASM IP Holding B.V. - Inventors: Eric Shero; Abhishek Mangoli; Harihara Krishnan Krishnamoorthy; Daniel Maurice; Julio Cesar Diaz; Massood Mostaghimi - Web page: https://patentgrep.com/patent/US20230054779A1 ## CPC - H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins} - H10P 72/0602: {Temperature monitoring} - H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection} - H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support} - H10P 74/20: characterised by the properties tested or measured, e.g. structural or electrical properties - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A reactor system with stuck lift pin detection. The system includes a reaction chamber, a susceptor for supporting wafers in an interior space of the reaction chamber, and an elevator for raising and lowering the susceptor in the interior space. Further, the system includes a lift pin supported by and extending vertically through the susceptor to travel between an up and a down position with movements of the susceptor by the elevator, and a landing pad is provided in the system for receiving a base of the lift pin when the lift pin is in the down position. Significantly, the system also includes a sensor assembly with a sensor positioned at least partially within the interior space of the reaction chamber. An output signal of the sensor is indicative of whether the lift pin is sticking or seizing during travel through the susceptor. ## Claims ### Claim 1 A reactor system with stuck lift pin detection, comprising: a reaction chamber; a susceptor for supporting wafers in an interior space of the reaction chamber; an elevator for raising and lowering the susceptor in the interior space; a lift pin supported by and extending vertically through the susceptor to travel between an up and a down position with movements of the susceptor by the elevator; a landing pad for receiving a base of the lift pin when the lift pin is in the down position; and a sensor assembly with a sensor positioned at least partially within the interior space of the reaction chamber, wherein an output signal of the sensor is indicative of whether the lift pin is sticking or seizing during travel through the susceptor. ### Claim 2 (depends on 1) The reactor system of claim 1, wherein the sensor assembly further includes a detection module displaying data based on the output signal of the sensor or processing the output signal of the sensor to detect when the lift pin is sticking or seizing during the travel through the susceptor. ### Claim 3 (depends on 2) The reactor system of claim 2, wherein the output signal provides a sensed temperature or pressure and wherein the processing of the output signal by the detection module includes comparing the sensed temperature or pressure with predefined temperature or pressure disturbances associated with travel of the lift pin free of sticking or seizing or includes comparing timing of the sensed temperature or pressure with reference to movements of the elevator. ### Claim 4 (depends on 1) The reactor system of claim 1, further comprising a cap covering an upper surface of the susceptor and wherein the sensor includes a temperature sensor positioned within a passageway provided in a body of the cap, whereby the output signal is associated with a sensed temperature of the cap. ### Claim 5 (depends on 4) The reactor system of claim 4, wherein the temperature sensor comprises a thermocouple or a resistance temperature detector positioned proximate to a center axis of the cap. ### Claim 6 (depends on 5) The reactor system of claim 5, wherein the temperature sensor includes a line for carrying the output signal extending away from the thermocouple or the resistance temperature detector and wherein the line includes two or more coils in the interior space of the reaction chamber. ### Claim 7 (depends on 4) The reactor system of claim 4, wherein the temperature sensor comprises a thermocouple or a resistance temperature detector positioned a radial distance from an edge of the cap that is in the range of 40 to 60 millimeters. ### Claim 8 (depends on 1) The reactor system of claim 1, wherein the sensor comprises a temperature sensor positioned within the landing pad, whereby the output signal is associated with a sensed temperature of the landing pad. ### Claim 9 (depends on 8) The reactor system of claim 8, wherein the temperature sensor comprises a thermocouple or a resistance temperature detector positioned in a head of the landing pad adapted for receiving the base of the lift pin. ### Claim 10 (depends on 1) The reactor system of claim 1, wherein the sensor comprises a gas inlet in the landing pad, a pressure sensor disposed exterior to the reaction chamber, and a flow line fluidically coupling the landing pad to the pressure sensor, whereby the output signal is associated with a sensed pressure in the flow line. ### Claim 11 (depends on 10) The reactor system of claim 10, wherein the gas inlet comprise a hole in a head of the landing pad, wherein the base of the lift pin covers or obstructs flow of gas through the hole when the lift pin is in the down position, and wherein the sensor assembly further comprises a gas pump coupled to the flow line operable to draw gas from the interior space of the reaction chamber through the landing pad and the flow line. ### Claim 12 A reactor system with stuck lift pin detection, comprising: a reaction chamber; a susceptor with a cap for supporting wafers in an interior space of the reaction chamber; an elevator for raising and lowering the susceptor in the interior space; a lift pin supported by and extending vertically through the susceptor to travel between an up and a down position with movements of the susceptor by the elevator; a landing pad for receiving a base of the lift pin when the lift pin is in the down position; and a sensor assembly including a temperature sensor positioned within a passageway provided in the cap, wherein an output signal of the temperature sensor provides a sensed temperature of the cap. ### Claim 13 (depends on 12) The reactor system of claim 12, wherein the sensor assembly further includes a detection module displaying temperature data for the cap based on the sensed temperature or processing the sensed temperature to detect when the lift pin is sticking or seizing during the travel through the susceptor. ### Claim 14 (depends on 13) The reactor system of claim 13, wherein the processing of the output signal by the detection module includes comparing the sensed temperature with predefined temperature disturbances associated with travel of the lift pin free of sticking or seizing or includes comparing timing of the sensed temperature with reference to movements of the elevator. ### Claim 15 (depends on 12) The reactor system of claim 12, wherein the temperature sensor comprises a thermocouple or a resistance temperature detector positioned proximate to a center axis of the cap. ### Claim 16 (depends on 12) The reactor system of claim 12, wherein the temperature sensor includes a line for carrying the output signal extending away from temperature sensor and wherein the line includes two or more coils in the interior space of the reaction chamber. ### Claim 17 (depends on 12) The reactor system of claim 12, wherein the temperature sensor is positioned within a passageway provided in a body of the cap, wherein the temperature sensor comprises a thermocouple or a resistance temperature detector positioned in the passageway at a radial distance from an edge of the cap that is in the range of 40 to 60 millimeters. ### Claim 18 A method for monitoring lift pin travel in a reaction chamber, comprising: with a temperature sensor, sensing a temperature of a susceptor cap at an operational state of the reaction chamber; comparing the temperature of the susceptor cap with a predefined range of expected temperatures for the operational state of the reaction chamber; and when the comparing determines the temperature of the susceptor cap is outside the predefined range of expected temperatures, generating an alert message or updating a graphical user interface (GUI) indicating a stuck lift pin condition. ### Claim 19 (depends on 18) The method of claim 18, wherein the operational state of the reaction chamber is associated with dropping a wafer upon an upper surface of the susceptor cap. ### Claim 20 (depends on 18) The method of claim 18, wherein the temperature sensor comprises a thermocouple or a resistance temperature detector positioned within the susceptor cap.