Purge controlling system
AssigneeBrillian Network & Automation Integrated System Co., Ltd.
InventorsCHEN-WEI KU, HAN-CHENG HU, MIN-CHE LI
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Abstract
A purge controlling system includes a purge module and a control module. The purge module is arranged in the load port and is electrically connected with the control module. The purge module includes an air curtain unit, a flow control unit and a sensing unit. The control module controls the purge module to provide adequate gas flow of purge gas into the air curtain unit and form a gas curtain according to the displacement value of the door assembly.
Claims11
A purge controlling system connected with a load port for loading a wafer cassette, the purge controlling system comprising:
- a purge module arranged in the load port, the purge module comprising:
- an air curtain unit arranged above a door assembly of the load port;
- a flow control unit connected to the air curtain unit;
- and
- a control module electrically connected with the purge module, wherein the control module controls the air curtain unit to create a flow velocity of a gas curtain according to a displacement value of the door assembly.
Dependencies are inferred from the claim text.