# US 2023/0053900 A1 · Method for producing multi-layered type microchannel device using photosenitive resin laminate

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- Number: US 2023/0053900 A1
- Document ID: US20230053900A1
- Status: Published application
- Kind: A1
- Application number: 17/980,153
- Filed: 2022-11-03
- Published: 2023-02-23
- Earliest claimed: 2019-06-17
- Assignees: Asahi Kasei Kabushiki Kaisha; National Institute of Advanced Industrial Science and Technology
- Applicants: Asahi Kasei Kabushiki Kaisha; National Institute of Advanced Industrial Science and Technology
- Inventors: Hidenori Nagai; Shunsuke Furutani; Kanako Mizumura; Yuzo Kotani
- Web page: https://patentgrep.com/patent/US20230053900A1

## CPC

- G03F 7/0035: {Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface}
- B01L 3/502707: {characterised by the manufacture of the container or its components}
- B81C 1/00071: {Channels}
- G03F 7/094: {Multilayer resist systems, e.g. planarising layers}
- G03F 7/32: Liquid compositions therefor, e.g. developers
- G03F 7/322: {Aqueous alkaline compositions}
- G03F 7/40: Treatment after imagewise removal, e.g. baking
- B81C 2201/0159: Lithographic techniques not provided for in B81C2201/0157
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)

## Abstract

Provided is a method for producing a multi-layered microchannel device by using a photosensitive resin laminate, which is highly-defined and excellent in dimension accuracy and enables channels to be partially hydrophilized or hydrophobilized, wherein the method comprises step (i) of sequentially carrying out (i-a) forming a first photosensitive resin layer on a substrate, (i-b) light-exposing the first photosensitive resin layer, and (i-c) developing the light-exposed photosensitive layer and forming a channel pattern layer, to form a first channel pattern layer; and step (ii) of sequentially carrying out (ii-a) laminating a second photosensitive resin laminate on the first channel pattern layer formed in the step (i), (ii-b) light-exposing a photosensitive layer of the second photosensitive resin laminate, and (ii-c) developing the light-exposed photosensitive layer and forming a channel pattern layer, to form a second channel pattern layer.

## Claims

### Claim 1

A microchannel device comprising a plurality of channel patterns, wherein a first channel pattern and at least one channel pattern formed on the first channel pattern are different in terms of wettability.

### Claim 2 (depends on 1)

The microchannel device according to claim 1, wherein the first channel pattern and at least one channel pattern formed on the first channel pattern are each formed of cured resins having a mutually different composition.

### Claim 3 (depends on 2)

The microchannel device according to claim 2, wherein the cured resins are different from each other in terms of a ratio (I/O).

### Claim 4 (depends on 1)

The microchannel device according to claim 1, wherein the first channel pattern is formed on a substrate, the microchannel device has a lid member on a channel pattern layer furthermost from the substrate, and the lid member is a laminate composed of a support film and a resin layer.

### Claim 5 (depends on 1)

The microchannel device according to claim 1, wherein the first channel pattern layer or at least one channel pattern layer formed on the first channel pattern has a transmission ratio at either or both of a wavelength of 515 nm and a wavelength of 600 nm of 80% or greater.

### Claim 6 (depends on 1)

The microchannel device according to claim 1, wherein the first channel pattern layer or at least one channel pattern layer formed on the first channel pattern has a layer thickness of 50 □m or greater.

### Claim 7 (depends on 1)

The microchannel device according to claim 1, wherein the channel pattern comprises (a) carboxyl group-containing alkali soluble polymer.

### Claim 8 (depends on 7)

The microchannel device according to claim 7, wherein the (a) carboxyl group-containing alkali soluble polymer is a (co)polymer of a first monomer which is carboxylic acid or acid anhydride having one polymerizable unsaturated group in the molecule, and a second monomer which is a non-acidic monomer having at least one polymerizable unsaturated group in the molecule, and
a copolymerization proportion of the first monomer and the second monomer is 10 to 60% by weight of the first monomer and 40 to 90% by weight of the second monomer.

### Claim 9 (depends on 7)

The microchannel device according to claim 7, wherein the channel pattern further comprises a polymer of (b) addition-polymerizable monomer.

### Claim 10 (depends on 9)

The microchannel device according to claim 9, wherein the (b) addition-polymerizable monomer contains at least one selected from the group consisting of a bisphenol A-based (meth)acrylate compound, a poly functional monomer, a monomer having repeated units of alkylene oxide, cyclic monomers and aromatic monomers.

### Claim 11 (depends on 4)

The microchannel device according to claim 4, wherein the support film is at least one selected from the group consisting of a polyethylene terephthalate film, polyvinyl alcohol film, polyvinyl chloride film, vinyl chloride copolymer film, polyvinylidene chloride film, vinylidene chloride copolymer film, polymethyl methacrylate copolymer film, polystyrene film, polyacrylonitrile film, styrene copolymer film, polyamide film, and cellulose derivative film.

### Claim 12 (depends on 4)

The microchannel device according to claim 4, wherein the substrate is at least one selected from the group consisting of an acrylic resin, polypropylene, polycarbonate resin, cycloolefin resin, polystyrene resin, polyester resin, urethane resin, vinyl chloride resin, silicone resin, and fluororesin.

### Claim 13 (depends on 12)

The microchannel device according to claim 12, wherein the substrate has metal wirings formed on a surface of the substrate.

### Claim 14 (depends on 1)

A POCT (Point of Care Testing) kit, or an ELISA (Enzyme-Linked ImmunoSorbent Assay) device, or a microreactor comprising the microchannel device according to claim 1.
