Measurement device
AssigneeTokyo Seimitsu Co., Ltd.
InventorsHideki MORII, Takuya INOUE
Life of this patent
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Abstract
A measurement device includes: a probe part including a probe configured to measure a surface of an object to be measured and is attached so as to swing around a swing center according to a shape of the surface of the object to be measured; a scale configured to measure displacement by swinging of the probe part; a scale head configured to read a scale mark of the scale; and an arm part to which the probe part is attached, the arm part is attached so as to swing around the swing center integrally with the probe part, and the scale is attached to the arm part. When thermal expansion coefficients of the probe part, the arm part and the scale are α, β and γ respectively, the measurement device satisfies a condition of α + γ − 1 / 2 α ≤ β ≤ α + γ + 1 / 2 α .
Claims5
A measurement device comprising:
- a probe part including a probe configured to measure a surface of an object to be measured and is attached so as to swing around a swing center according to a shape of the surface of the object to be measured;
- a scale configured to measure displacement by swinging of the probe part;
- a scale head configured to read a scale mark of the scale;
- and
- an arm part to which the probe part is attached, the arm part being attached so as to swing around the swing center integrally with the probe part, and the scale being attached to the arm part,
- wherein, when thermal expansion coefficients of the probe part, the arm part and the scale are α, β and γ respectively, the measurement device satisfies a condition of
- (
- α
- +
- γ
- )
- −
- 1
- /
- 2
- α
- ≤
- β
- ≤
- (
- α
- +
- γ
- )
- +
- 1
- /
- 2
- α
- .
A measurement device comprising:
- a probe part including a probe configured to measure a surface of an object to be measured and attached so as to swing around a swing center according to a shape of the surface of the object to be measured;
- a scale configured to measure displacement by swinging of the probe part;
- a scale head configured to read a scale mark of the scale;
- an arm part to which the probe part is attached, the arm part being attached so as to swing around the swing center integrally with the probe part, and the scale being attached to the arm part;
- a temperature sensor configured to measure an ambient temperature;
- and
- a controller configured to calculate actual displacement xT of a distal end part of the probe part by following expressions, when thermal expansion coefficients of the probe part, the arm part and the scale are α, β and γ respectively, a measured value of displacement of the distal end part of the probe part is xF, and a change amount of the ambient temperature when measuring the measured value xF is ΔT,
- x
- T
- =cx
- F
- c=
- 1
- +
- α
- Δ
- T
- /
- 1
- +
- β−γ
- Δ
- T
- .
- .
Dependencies are inferred from the claim text.