Optical device, method and use
AssigneesSurfunction GmbH, Dlip Ug
InventorsBogdan VOISIAT, Andrés Fabián LASAGNI
Life of this patent
Estimating the term…
Abstract
An optical device, its use, and a method for interference structuring of a sample. A laser emits a laser beam that is split into at least two partial beams by a beam splitter. A first cylindrical lens and a second cylindrical lens for refracting the partial beams into an interference area are arranged in the beam path. The partial beams interfere in such a way that a structure having linear structure elements may be formed in a structural region of the sample. The cylinder axis of the first cylindrical lens is aligned parallel to the cylinder axis of the second cylindrical lens.
Claims12
An optical device for interference structuring of a sample, the optical device comprising:
- a laser to emit a laser beam;
- a beam splitter to split the laser beam into at least two partial beams;
- at least one first cylindrical lens;
- at least one second cylindrical lens to refract the at least two partial beams in the direction of an interference region;
- and
- at least one third cylindrical lens provided as a converging lens,
- wherein the beam splitter, the at least first cylindrical lens, and the at least one second cylindrical lens are arranged in a beam path of the laser beam such that the at least two partial beams of the laser beam interfere with one another in the interference region such that a structure having linear structural elements is adapted to be formed in the structural region of the sample, and
- wherein a cylinder axis of the at least one first cylindrical lens is aligned substantially parallel to the cylinder axis of the at least one second cylindrical lens, and
- wherein the cylinder axis of the at least one third cylindrical lens is oriented substantially perpendicular to the cylinder axis of the at least one cylindrical lens and substantially perpendicular to the optical axis.
Dependencies are inferred from the claim text.