Systems and methods for calibrating and tuning a mass flow controller
AssigneeFlow Devices and Systems Inc.
InventorBhushan Somani
Life of this patent
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Abstract
A mass flow control apparatus and methods for calibrating and tuning the mass flow apparatus are provided. The mass flow apparatus can be calibrated by receiving a calibration input signal that provides one or more properties of a gas that is flowing through a main fluid flow path and performing one or more measurements, using one or more sensors, on the gas. The calibration includes determining a calibration parameter based on the results of the one or more measurements and the calibration input signal and adjusting a proportional valve, based on the calibration parameter, to adjust a flow rate, of the gas through the apparatus, to match a setpoint flow rate.
Claims20
A mass flow control apparatus, the apparatus comprising:
- a main fluid flow path connected to a proportional valve;
- at least one sensor that measures a property of a gas in the main fluid flow path;
- a control module configured to calculate a rate of decay from a signal from the at least one sensor when an inlet valve is closed;
- the control module is further configured to receive a setpoint flow rate;
- the control module is further configured to adjust the proportional valve to adjust a flow rate, of the gas through the apparatus, to match the setpoint flow rate;
- the control module is further configured to determine a response to the flow rate after adjusting the proportional valve;
- and
- the proportional valve comprises an elastomeric valve disc that is movable to seal the main fluid flow path when the proportional valve is closed.
A mass flow control apparatus, the mass flow control apparatus comprising:
- a main fluid flow path connected to a proportional valve;
- at least one sensor that measures a property of a gas in the main fluid flow path;
- a control module configured to receive a setpoint flow rate;
- the control module is further configured to adjust the proportional valve to adjust a flow rate, of the gas through the apparatus, to match the setpoint flow rate;
- and
- the proportional valve comprises an elastomeric valve disc that is movable to seal the main fluid flow path when the proportional valve is closed.
A mass flow control apparatus, the apparatus comprising:
- a main fluid flow path connected to a proportional valve;
- at least one sensor that measures a property of a gas in the main fluid flow path;
- a control module configured to calculate a rate of decay from a signal from the at least one sensor when an inlet valve is closed;
- the control module is further configured to receive a setpoint flow rate;
- the control module is further configured to adjust the proportional valve to adjust a flow rate, of the gas through the apparatus, to match the setpoint flow rate;
- the proportional valve comprises an elastomeric valve disc that is movable to seal the main fluid flow path when the proportional valve is closed;
- wherein a shape of elastomeric material of the valve disc comprises a solid cylinder;
- and
- wherein the valve disc fits over a valve seat to close the proportional valve when the proportional valve is in a closed state.
Dependencies are inferred from the claim text.