An apparatus for correcting an assembly deviation and a process error thereof using a sensing mark, the apparatus comprising:
- a frame;
- a machining unit formed inside or outside the frame with respect to the frame and performing a predetermined process;
- a conveying unit formed inside or outside the frame with respect to the frame and performing predetermined conveying;
- a sensing mark formed on the frame, the machining unit, or the conveying unit;
- an imaging unit formed inside or outside the frame and creating an original image by imaging the sensing mark;
- and
- a measuring unit deriving a 3D position variation value of the frame, the machining unit, or the conveying unit by deriving an image variation value of the sensing mark by analyzing the original image transmitted from the imaging unit imaging the sensing mark formed on the frame, the machining unit, or the conveying unit.