Pellicle membrane, pellicle, membrane, graphene sheet, and method for producing the graphene sheet
AssigneeToppan Inc.
InventorsNaoya TAKADA, Kazunori SEKI, Yutaka KODERA
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Abstract
A technique that enables production of pellicle membranes that are better resistant to breakage when subjected to force exerted thereon in the thickness direction thereof and that have high transmittance to light. A pellicle membrane of the present invention includes a plurality of laminated layers, where at least one of the layers is provided with at least one hole having a width or diameter of 10 nm to 500 nm.
Claims26
A pellicle membrane, comprising:
- a plurality of laminated layers,
- the laminated layers including at least a first layer and a second layer,
- wherein at least the first layer comprises at least one hole, the at least one hole having a width or diameter of 10 nm to 500 nm.
A pellicle membrane, comprising:
- a plurality of laminated layers,
- the laminated layers including at least a first layer and a second layer,
- wherein each of at least the first and second layers comprises at least one hole.
A pellicle membrane, comprising:
- a plurality of laminated layers,
- the laminated layers including at least a first layer and a second layer, wherein:
- the laminated layers are each comprised of a material selected from graphene and carbon nanotube;
- and
- at least the first layer comprises at least one hole.
A pellicle membrane, comprising:
- a plurality of laminated graphene sheets,
- each of the graphene sheets having a true density and an apparent density, the apparent density being less than the true density.
A pellicle membrane, comprising:
- a laminate comprising a plurality of laminated graphene sheets, the laminate having a first thickness and a first level of transmittance,
- the first thickness of the laminate being equal to a second thickness of a reference laminate, the first level of transmittance being higher than a second level of light transmittance of the reference laminate,
- the reference laminate comprising a plurality of laminated graphene continuous-membrane sheets.
A membrane, comprising:
- a plurality of laminated graphene sheets,
- the laminated graphene sheets including at least a first graphene sheet and a second graphene sheet,
- wherein at least the first graphene sheet comprises at least one hole.
A membrane, comprising:
- a plurality of laminated graphene sheets,
- each of the graphene sheets having a true density and an apparent density, the apparent density being less than the true density.
A membrane, comprising:
- a laminate comprising a plurality of laminated graphene sheets, the laminate having a first thickness and a first level of transmittance,
- the first thickness of the laminate being equal to a second thickness of a reference laminate, the first level of transmittance being higher than a second level of transmittance of the reference laminate,
- the reference laminate comprising a plurality of laminated graphene continuous-membrane sheets.
A graphene sheet comprising at least one hole.
A method for producing a graphene sheet, comprising the steps of:
- forming at least one mask layer on a metal layer such that the at least one mask layer partially covers the metal layer;
- and
- producing graphene on a portion of the metal layer not covered by the mask layer.
A method for producing a graphene sheet, comprising the steps of:
- producing graphene on a metal layer having at least one hole.
Dependencies are inferred from the claim text.