Sealing interface to adjust radial and angular offset
AssigneeLam Research Corporation
InventorTyler Green
Life of this patent
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AssigneeLam Research Corporation
InventorTyler Green
Estimating the term…
A sealing interface includes a first tube having an end with a convex surface and a second tube having an end with a convex surface. A spacer is disposed between the respective ends of the first and second tubes. One side of the spacer has a concave surface that substantially matches the convex surface of the end of the first tube, and another side of the spacer has a concave surface that substantially matches the convex surface of the end of the second tube. The spacer includes a through hole in fluid communication with a fluid passageway of the first tube and a fluid passageway of the second tube. Tying elements are respectively coupled to the first tube and the second tube, with the tying elements applying a compressive force between the first tube and the spacer, and applying a compressive force between the second tube and the spacer.
A sealing interface, comprising,
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Dependencies are inferred from the claim text.