Device for realizing surface cleaning of optical element by ion wind and electrostatic coupling

A device for realizing surface cleaning of an optical element by ion wind and electrostatic coupling, comprising a fixing support, an optical element, an ion wind system, an electrostatic adsorption system, and a particle contaminant storage box,

• wherein
• the fixing support is a triangular prism which is horizontally placed, the inclined surface of the front side of the fixing support is a working surface, an included angle between the working surface and the horizontal plane is 45 degrees, a bottom plate is fixed on the working surface, wherein the ion wind system, the electrostatic adsorption system and the particle contaminant storage box are fixed on the bottom plate from top to bottom;
• the ion wind system comprises an air knife, an ion bar support, a three-degree-of-freedom combined displacement stage, an ion bar and a connecting sheet, wherein the three-degree-of-freedom combined displacement stage is connected with the air knife through the connecting sheet, the air knife, at the position close to two ends, is connected with two ion bar supports, and the ion bar is fixed on the two ion bar supports;
• and
• the electrostatic adsorption system comprises two electrode fixing supports I, two electrode fixing supports II, two electrode fixing supports III, a rod-shaped electrode positive electrode, a rod-shaped electrode negative electrode and a manual displacement stage, the two electrode fixing supports I and the two electrode fixing supports II are all transversely arranged along the bottom plate and fixed on the bottom plate, the two electrode fixing supports II are arranged on the inner sides of the two electrode fixing supports I, and the rod-shaped electrode negative electrode adjusts the height of the rod-shaped electrode negative electrode through jackscrews fixed at different positions on the two electrode fixing supports II, and the two electrode fixing supports I and the two electrode fixing supports II are connected through a manual displacement stage, and the rod-shaped electrode positive electrode is installed on the two electrode fixing supports III.