Illumination optical system, exposure apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorMichio Kono
Life of this patent
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Abstract
An illumination optical system of the present invention includes a first lens array FE including a plurality of lens cells dividing a light flux emitted from a light source into a plurality of light fluxes, a second lens array MLAi including lens cells on which spot lights exiting from the lens cells included in the first lens array FE are condensed, and a first optical member IL3 imaging the spot light, which has been condensed on the lens cell included in the second lens array MLAi, on one of optical modulation elements constituting an optical modulation unit.
Claims20
An illumination optical system illuminating an optical modulation unit including a plurality of optical modulation elements with a light flux emitted from a light source, the illumination optical system comprising:
- a first lens array including a plurality of lens cells dividing the light flux emitted from the light source into a plurality of light fluxes;
- a second lens array including lens cells on which spot lights exiting from the lens cells included in the first lens array are condensed;
- and
- a first optical member imaging the spot light, which has been condensed on the lens cell included in the second lens array, on one of the optical modulation elements constituting the optical modulation unit,
- wherein the second lens array and the optical modulation unit are in a conjugate relation via the first optical member.
An illumination optical system illuminating an optical modulation unit including a plurality of optical modulation elements with a light flux emitted from a light source, the illumination optical system comprising:
- a lens array including a plurality of lens cells dividing the light flux emitted from the light source into a plurality of light fluxes;
- a light-shielding member illuminated by the lens array and including a plurality of openings;
- and
- a first optical member imaging the spot light, which have passed through the opening of the light-shielding member, on one of the optical modulation elements constituting the optical modulation unit,
- wherein the light-shielding member and the optical modulation unit are in a conjugate relation via the first optical member.
An illumination optical system illuminating an optical modulation unit including a plurality of optical modulation elements with a light flux emitted from a light source, the illumination optical system comprising:
- an integrator making a light intensity distribution of the light flux emitted from the light source be uniform;
- a lens array including lens cells on which a light flux having passed through the integrator is condensed;
- and
- an optical member imaging the light flux, which has been condensed on the lens cell, on one of the optical modulation elements constituting the optical modulation unit,
- wherein the lens array and the optical modulation unit are in a conjugate relation via the first optical member.
Dependencies are inferred from the claim text.