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US 2022/0389130 A1Published application
Film, laminate, semiconductor wafer with film layer, substrate for mounting semiconductor with film layer, and semiconductor device
AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsMasashi OKANIWA, Kohei HIGASHIGUCHI, Takahito SEKIDO, Kentaro TAKANO, Tsuyoshi KIDA
Life of this patent
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Abstract
The present application provides a film containing: a compound (A) containing at least one selected from the group consisting of a maleimide compound and a citraconimide compound; an organic peroxide (B) containing at least one selected from the group consisting of organic peroxides represented by specific formulae; and an imidazole compound (C) represented by a specific formula.
Claims29
A film comprising:
- a compound (A) comprising at least one selected from the group consisting of a maleimide compound and a citraconimide compound;
- an organic peroxide (B) comprising at least one selected from the group consisting of organic peroxides represented by the following formula (1) and the following formula (2);
- and
- an imidazole compound (C) represented by the following formula (5):
- wherein each R1 independently represents a hydrogen atom, a methyl group, or an ethyl group;
- wherein each R2 independently represents a hydrogen atom, a methyl group, or an ethyl group, and X1 represents a group represented by the following formula (3) or (4);
- wherein R3 represents a hydrogen atom, a methyl group, or an ethyl group, R4 represents an alkylene group having 1 or more and 3 or less carbon atoms, and R5 represents a hydrogen atom or an alkyl group having 1 or more and 6 or less carbon atoms;
- wherein each R6 independently represents a hydrogen atom, a methyl group, or an ethyl group, and X2 represents a group represented by the following formulae (a) to (c);
- wherein n1 represents an integer of 1 or more and 5 or less;
- and
- wherein R7 represents a methyl group or an ethyl group, R8 represents a hydrogen atom, an alkyl group having 1 or more and 5 or less carbon atoms, an aryl group, or an aralkyl group, and R9 represents a hydrogen atom, an alkyl group having 1 or more and 5 or less carbon atoms, an aryl group, or an aralkyl group.
8 more elements
Dependencies are inferred from the claim text.