Semiconductor devices and methods of manufacturing semiconductor devices

A semiconductor device, comprising:

• a substrate comprising a base and a sidewall extending vertically from the base;
• a lid over the sidewall to define a cavity between the base, the sidewall, and the lid;
• an electronic component in the cavity;
• a valve between the cavity and an exterior environment outside the cavity;
• a seal between the lid and the sidewall;
• and
• a plug in the valve;
• wherein the seal and the plug hermetically seal the cavity from the exterior environment;
• and
• wherein the valve comprises a through-hole in the lid between the lid and the sidewall of the substrate.

A method to manufacture a semiconductor device, comprising:

• providing a cavity substrate comprising a base and a sidewall to define a cavity;
• providing an electronic component on a top side of the base in the cavity;
• providing a lid over the cavity and over the sidewall, wherein:
• the lid comprises a valve to provide access to the cavity;
• and
• the valve comprises a through-hole in the lid between the lid and the sidewall of the cavity substrate;
• and
• providing a plug in the valve to provide a seal between a cavity environment and an exterior environment outside the cavity.