Substrate treating apparatus and substrate treating system
AssigneeSemes Co., Ltd.
InventorsSang Hwan LEE, Yong Seok JANG
Life of this patent
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Abstract
Disclosed is a substrate treating apparatus. The substrate treating apparatus includes an index part having a load port, and a process executing part that receives a substrate from the index part and treats the substrate, the load port includes a housing having an interior space, a seating part disposed on an upper side of the housing, and on which a container that receives a substrate type sensor is positioned, and a charging unit that charges a power source device installed in the container in a wireless charging scheme.
Claims20
A substrate treating apparatus comprising:
- an index part having a load port;
- and
- a process executing part configured to receive a substrate from the index part and treat the substrate,
- wherein the load port includes:
- a housing having an interior space;
- a seating part disposed on an upper side of the housing, and on which a container that receives a substrate type sensor is positioned;
- and
- a charging unit configured to charge a power source device installed in the container in a wireless charging scheme.
A substrate treating system comprising:
- an index part having a load port;
- a process executing part configured to receive a substrate from the index part and treat the substrate;
- and
- a container positioned in the load port, and configured to receive a substrate type sensor carried into the process executing part,
- wherein the container further includes:
- a body having a reception space having, one side of which is opened;
- a door configured to selectively open and close the reception space;
- a shelf part configured to support the substrate type sensor in the reception space;
- and
- a power source device configured to deliver electric power for charging the substrate type sensor, and
- wherein the load port includes:
- a housing having an interior space;
- a seating part disposed on an upper side of the housing, and on which a container that receives a substrate type sensor is positioned;
- and
- a charging unit configured to charge a power source device installed in the container in a wireless charging scheme.
A substrate treating system comprising:
- an index chamber, an interior of which is maintained at an atmospheric pressure atmosphere, and provided with a first transfer robot;
- an index part having a load port connected to the index chamber;
- a load lock chamber connected to the index chamber, and an interior of which is converted between a vacuum pressure atmosphere and the atmospheric pressure atmosphere;
- a transfer chamber connected to the load lock chamber and provided with a second transfer robot;
- a process chamber connected to the transfer chamber, and configured to treat a substrate;
- and
- a container positioned in the load port, and configured to receive a substrate type sensor that collects a transfer location of an expendable component transferred to the process chamber, and
- wherein the load port includes:
- a housing having an interior space;
- a seating part disposed on an upper side of the housing, and on which the container is positioned;
- and
- a charging unit configured to charge a power source device installed in the container in a wireless charging scheme.
Dependencies are inferred from the claim text.