Conductive composite, resist coating material, resist, and method for forming resist pattern
AssigneeMitsubishi Chemical Corporation
InventorsSaki NAKANO, Takahiro MORI
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Abstract
There is provided a conductive composite having excellent conductivity and able to form a conductive film with which film loss in a resist layer is low. The conductive composite of the present invention includes a conductive polymer and a surfactant. When a critical micelle concentration of the surfactant is less than 0.1% by mass, a content of the surfactant is 5 parts by mass or more with respect to 100 parts by mass of the conductive polymer. In addition, when the critical micelle concentration of the surfactant is 0.1% by mass or more, the content of the surfactant is more than 100 parts by mass with respect to 100 parts by mass of the conductive polymer.
Claims20
A conductive composite comprising:
- a conductive polymer;
- and
- a surfactant,
- wherein a critical micelle concentration of the surfactant is less than 0.1% by mass and a content of the surfactant is 5 parts by mass or more with respect to 100 parts by mass of the conductive polymer.
A conductive composite comprising:
- a conductive polymer;
- and
- a surfactant,
- wherein a critical micelle concentration of the surfactant is 0.1% by mass or more and a content of the surfactant is more than 100 parts by mass with respect to 100 parts by mass of a content of the conductive polymer.
Dependencies are inferred from the claim text.